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Method and systems for in-situ formation of intermediate reactive species

  • US 9,589,770 B2
  • Filed: 03/08/2013
  • Issued: 03/07/2017
  • Est. Priority Date: 03/08/2013
  • Status: Active Grant
First Claim
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1. A remote plasma system comprising:

  • a reactor comprising a reaction chamber;

    a remote plasma unit fluidly coupled to the reaction chamber and to a vacuum source;

    a first gas source fluidly coupled to the remote plasma unit, wherein the first gas source comprises a precursor for intermediate reactive species;

    a pressure control device in fluid communication with and interposed between the remote plasma unit and the vacuum source, wherein the pressure control device controls a pressure upstream of the pressure control device and wherein the pressure control device is a closed-loop pressure control device;

    a control valve, between the remote plasma unit and the reaction chamber, to pulse the intermediate reactive species from the remote plasma unit to the reaction chamber and to maintain steady-state operation of remote plasma unit; and

    a controller coupled to the pressure control device and to the control valve and configured to control the pressure control device and the control valve to maintain steady-state operation of the remote plasma unit when the intermediate reactive species are pulsed to the reaction chamber using the control valve to switch a flow of the intermediate reactive species between the reaction chamber and the vacuum source.

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