In-situ etch rate determination for chamber clean endpoint

• US 9,589,773 B2
• Filed: 04/22/2016
• Issued: 03/07/2017
• Est. Priority Date: 04/23/2015
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Bhatia, Sidharth, Patel, Anjana M., Khaja, Abdul Aziz
• Primary Examiner(s): CULBERT, ROBERTS P
• Application Number:
  US15/136,788
• Publication Number:
  US 20160314944A1
• Time in Patent Office: 319 Days
• Field of Search: 216/59
• US Class Current: 1/1
• CPC Class Codes: H01J 2237/334 Etching
• CPC Class Codes: H01J 37/32963 End-point detection

Abstract

Embodiments described herein relate to methods for determining a cleaning endpoint. A first plasma cleaning process may be performed in a clean chamber environment to determine a clean time function defined by a first slope. A second plasma cleaning process may be performed in an unclean chamber environment to determine a clean time function defined by a second slope. The first and second slope may be compared to determine a clean endpoint time.

Claims

1. A method of endpoint detection, comprising:

performing a first plasma cleaning process in a clean chamber environment;

determining first etch rates at two or more time intervals during the first plasma cleaning process;

determining a first slope defined by the two or more time intervals, wherein the first slope defines the first etch rates as a function of time;

performing a second plasma cleaning process in an unclean chamber environment;

determining second etch rates at two or more time intervals during the second plasma cleaning process;

determining a second slope defined by the two or more time intervals, wherein the second slope defines the second etch rates as a function of time; and

comparing the first slope and the second slope to determine a clean endpoint time.

2. The method of claim 1, wherein the first plasma cleaning process defines a baseline reference.

3. The method of claim 2, wherein the baseline reference is thermally unstable.

4. The method of claim 1, wherein the clean chamber environment is substantially devoid of material deposits.

5. The method of claim 1, wherein the first plasma cleaning process and the second plasma cleaning process utilize a fluorine based chemistry, a chlorine based chemistry, an oxygen based chemistry, or combinations and mixtures thereof.

6. The method of claim 1, wherein the two or more time intervals for the first plasma cleaning process and the two or more time intervals for the second plasma cleaning process are the same.

7. The method of claim 1, wherein the two or more time intervals define an endpoint time range.

8. The method of claim 7, wherein the endpoint time range is determined by comparing the first slope and the second slope.

9. The method of claim 8, further comprising:

determining the clean endpoint time within the endpoint time range at a point where the first slope and second slope are substantially equal.

10. The method of claim 1, further comprising:

after determining the clean endpoint time, adding an amount of clean time less than about 5% of the total clean time to the clean endpoint time.

11. A method of endpoint detection, comprising:

performing a first plasma cleaning process in a clean chamber environment;

determining first etch rates at two or more time intervals during the first plasma cleaning process;

determining a first slope defined by the two or more time intervals, wherein the first slope defined the first etch rates as a function of time;

performing a second plasma cleaning process in an unclean chamber environment;

determining second etch rates at two or more time intervals during the second plasma cleaning process;

determining a second slope defined by the two or more time intervals, wherein the second slope defines the second etch rates as a function of time;

determining an endpoint time range defined by the two or more time intervals; and

comparing the first slope and the second slope within the endpoint time range to determine a clean endpoint time at a point where the first slope and the second slope are substantially equal.

12. The method of claim 11, wherein the two or more time intervals for the first plasma cleaning process and the two or more time intervals for the second plasma cleaning process are the same.

13. The method of claim 11, wherein the first plasma cleaning process defines a baseline reference.

14. The method of claim 13, wherein the baseline reference is thermally unstable.

15. A method of endpoint detection, comprising:

performing a first cleaning process in a clean chamber environment;

determining a first etch rate for the first cleaning process;

performing a second cleaning process in the clean chamber environment;

determining a second etch rate for the second cleaning process, wherein the first etch rate and the second etch rate define a first slope;

performing a third cleaning process in an unclean chamber environment;

determining a third etch rate of the third cleaning process;

performing a fourth cleaning process in the unclean chamber environment;

determining a fourth etch rate of the fourth cleaning process, wherein the third etch rate and the fourth etch rate define a second slope within about 2% of the first slope; and

determining a clean endpoint time where the first slope and the second slope are substantially equal.

16. The method of claim 15, wherein the first slope defines a baseline reference.

17. The method of claim 16, wherein the first slope if thermally unstable.

18. The method of claim 15, wherein the first cleaning process, the second cleaning process, the third cleaning process, and the fourth cleaning process utilize a fluorine based chemistry, a chlorine based chemistry, an oxygen based chemistry, or combinations and mixtures thereof.

19. The method of claim 15, further comprising:

determining an end point time range by comparing the first slope and the second slope over an interval where the first slope and the second slope are substantially equal.

20. The method of claim 15, further comprising:

after determining the clean endpoint time, adding an amount of clean time less than about 5% of the total clean time to the clean endpoint time.