Semiconductor devices with switchable ground-body connection

• US 9,590,674 B2
• Filed: 12/14/2012
• Issued: 03/07/2017
• Est. Priority Date: 12/14/2012
• Status: Active Grant

• Current Assignee: pSemi Corporation (Murata Manufacturing Co Limited)
• Original Assignee: Peregrine Semiconductor Corporation (Murata Manufacturing Co Limited)
• Inventors: Olson, Chris
• Primary Examiner(s): Chen, Junpeng
• Application Number:
  US13/715,805
• Publication Number:
  US 20140171010A1
• Time in Patent Office: 1,544 Days
• US Class Current: 1/1
• CPC Class Codes: H01L 27/088 the components being field-effect transistors with insulated gate
• CPC Class Codes: H01L 27/092 complementary MIS field-effect transistors
• CPC Class Codes: H01L 29/7841 with floating body, e.g. programmable transistors
• CPC Class Codes: H04B 1/16 Circuits

Abstract

Semiconductor devices with switchable connection between body and a ground node are presented. Methods for operating and fabricating such semiconductor devices are also presented.

Claims

1. A semiconductor device, comprising:

a four terminal transistor that is fabricated on a substrate, the transistor comprising;

i) a first terminal in contact with a first region of the transistor;

ii) a second terminal in contact with a second region of the transistor;

iii) a third terminal configured, during operation of the transistor, to receive a voltage to control a conduction channel in a portion of a body region of the transistor between the first region and the second region; and

iv) a body terminal in contact with the body region; and

a switch with a first switch terminal connected to the body terminal and a second switch terminal connected to a reference potential node, a closed condition and an open condition of the switch being controlled by a control signal to provide a first operating characteristic in the transistor by connecting the body terminal to the reference potential node when the switch is closed, and to provide a second operating characteristic in the transistor by disconnecting the body terminal from the reference potential node when the switch is open,

wherein;

the switch comprises an inductor operatively connected between the switch and the reference potential node, the inductor configured to cause the body region to float relative to AC and to connect the body region to the reference potential relative to DC,

the first operating characteristic comprises a reduction in a leakage current between the first terminal and the second terminal, and

the second operating characteristic comprises an increase of a power added efficiency (PAE) of the transistor.

2. The semiconductor device according to claim 1, wherein the transistor is a silicon on insulator NMOS transistor or a bulk NMOS transistor.

3. The semiconductor device according to claim 1, wherein in the transistor is configured as one of:

a) an amplifier, and b) a power amplifier.

4. The semiconductor device according to claim 1, further comprising:

a control circuit that is configured to generate a switch de-activation signal for disconnecting the body terminal of the transistor from the reference potential node.

5. The semiconductor device according to claim 4, wherein the switch and the control circuit are fabricated on a common substrate.

6. The semiconductor device according to claim 4, further comprising:

a radio frequency (RF) signal detector configured to detect an RF signal in the semiconductor device, wherein the control circuit is configured to receive the detected RF signal and to generate the switch de-activation signal based on the detected RF signal.

7. The semiconductor device according to claim 6, wherein the RF signal is detected in at least one of a source node, a gate node, or a drain node respectively in correspondence of the second terminal, the third terminal and the first terminal of the transistor.

8. The semiconductor device according to claim 7, the control circuit being configured to remove the switch de-activation signal when the RF signal detector fails to detect an RF signal, wherein removal of the switch de-activation signal activates the switch and connects the body terminal of the transistor to the reference potential node.

9. The semiconductor device according to claim 7, the control circuit being configured to replace the switch de-activation signal with a switch activation signal when the RF signal detector fails to detect an RF signal, wherein the switch activation signal is configured to activate the switch and connect the body terminal to the reference potential node.

10. The semiconductor device according to claim 6, wherein:

the RF signal detector comprises an RF coupler configured to split the detected RF signal into at least a first component and a second component,

the transistor is configured to receive the first component and the control circuit is configured to receive the second component, and

the control circuit is configured to generate the switch de-activation signal based on the second component of the detected RF signal.

11. The semiconductor device according to claim 1, wherein the switch comprises an NMOS switching transistor.

12. A semiconductor device, comprising:

a stacked arrangement of transistors that is fabricated on a substrate, each transistor of the stacked arrangement comprising;

i) a first terminal in contact with a first region of the transistor;

ii) a second terminal in contact with a second region of the transistor;

iii) a third terminal, configured, during operation of the transistor, to receive a voltage to control a conduction channel in a portion of a body region of the transistor between the first region and the second region; and

iv) a body terminal in contact with the body region; and

one or more switches in correspondence of one or more transistors from the stacked arrangement of transistors, each with a first switch terminal connected to the body terminal of a corresponding transistor from the one or more transistors, and a second switch terminal connected to a corresponding reference potential node, a closed condition and an open condition of the one or more switches being controlled by a control signal to provide a first operating characteristic in the corresponding transistor by connecting the body terminal of the corresponding transistor to the corresponding reference potential node when a corresponding switch is closed, and to provide a second operating characteristic in the corresponding transistor by disconnecting the body terminal from the reference potential node when the corresponding switch is open,

wherein;

at least one switch of the one or more switches comprises an inductor operatively connected between the at least one switch and the corresponding reference potential node, the inductor configured to cause the body region of the corresponding transistor to float relative to AC and to connect the body region of the corresponding transistor to the reference potential relative to DC,

the first operating characteristic comprises a reduction in a leakage current between the first terminal and the second terminal, and

the second operating characteristic comprises an increase of a power added efficiency (PAE) of the transistor.

13. The semiconductor device according to claim 12, wherein in the stacked arrangement of transistors is configured as one of:

a) an amplifier, and b) a power amplifier.

14. The semiconductor device according to claim 12, wherein at least one of the one or more switches comprises an NMOS switching transistor.

15. The semiconductor device according to claim 12, further comprising:

a control circuit that is configured to generate a switch de-activation signal for disconnecting the body terminal of each of the one or more transistors from the corresponding reference potential node.

16. The semiconductor device according to claim 15, further comprising:

a radio frequency (RF) signal detector configured to detect an RF signal in the semiconductor device, wherein the control circuit is configured to receive the detected RF signal and to generate the switch de-activation signal based on the detected RF signal.

17. A method of operating a transistor that is fabricated on a substrate, the transistor comprising a first terminal in contact with a first region of the transistor, a second terminal in contact with a second region of the transistor, a third terminal configured to receive a voltage to control a conduction channel in a portion of a body region of the transistor between the first region and the second region, and a body terminal in contact with the body region, the method comprising:

coupling a body terminal of the transistor to a reference potential node when no input signal is provided to the transistor, thereby reducing a leakage current between a first terminal and the second terminal; and

decoupling the body terminal from the reference potential node when a radio frequency (RF) signal is provided to the transistor, thereby increasing a power added efficiency (PAE) of the transistor.

18. The method according to claim 17, wherein the transistor is a silicon on insulator NMOS transistor or a bulk NMOS transistor.

19. The method according to claim 18, wherein the coupling and decoupling are carried out via a switch.

20. The method according to claim 19, wherein the switch is an NMOS switching transistor.

21. The method according to claim 17, wherein the RF signal encompasses at least one of a UHF or a VHF band of radio frequencies.

22. The method according to claim 17, wherein the RF signal comprises a WCDMA signal or an LTE signal.

23. A method of fabricating a semiconductor device, comprising:

fabricating a transistor on a substrate, the transistor comprising;

i) a first terminal in contact with a first region of the transistor;

ii) a second terminal in contact with a second region of the transistor;

iii) a third terminal configured, during operation of the transistor, to receive a voltage to control a conduction channel in a portion of a body region of the transistor between the first region and the second region; and

iv) a body terminal in contact with the body region; and

fabricating a switch on the substrate with a first switch terminal of the switch connected to the body terminal and a second switch terminal of the switch connected to a reference potential node, and

fabricating a control circuit on the substrate, the control circuit operable to provide a switch de-activation signal for operating the switch to selectively disconnect the body terminal from the reference potential node,

wherein the switch de-activation signal is provided to the switch upon detection of an RF signal in the semiconductor device.

24. The method according to claim 23, wherein the switch de-activation signal is provided to the switch upon detection of the RF signal in at least one of a drain node, a source node, a gate node respectively in correspondence of the first terminal, the second terminal and the third terminal of the transistor.

25. A method of operating a stacked arrangement of transistors, comprising:

coupling a body terminal of one or more transistors from the stacked arrangement of transistors to a corresponding reference potential node when no input signal is provided to an input transistor of the stacked arrangement, thereby providing a corresponding reference potential to the body terminal; and

decoupling the body terminal of the one or more transistors from the corresponding reference node when a radio frequency (RF) signal is provided to the input transistor, thereby floating the body terminal, wherein the one or more transistors comprises the input transistor,

wherein;

the one or more transistors are fabricated on a common substrate, and

each of the one or more transistors comprises;

i) a first terminal in contact with a first region of the transistor;

ii) a second terminal in contact with a second region of the transistor;

iii) a third terminal configured, during operation of the transistor, to receive a voltage to control a conduction channel in a portion of a body region of the transistor between the first region and the second region; and

iv) the body terminal in contact with the body region.

26. The method according to claim 25, wherein one or more transistors from the stacked arrangement of transistors is a silicon on insulator NMOS transistor or a bulk NMOS transistor.

27. The method according to claim 26, wherein the coupling and decoupling are carried out via one or more switches in correspondence of the one or more transistors.

28. The method according to claim 27, wherein a switch from the one or more switches is an NMOS switching transistor.

29. The method according to claim 25, wherein the RF signal encompasses at least one of a UHF or a VHF band of radio frequencies.

30. The method according to claim 25, wherein the RF signal comprises a WCDMA signal or an LTE signal.

31. A method of fabricating a semiconductor device, comprising:

fabricating a stacked arrangement of one or more transistors on a substrate, each of the one or more transistors having a body terminal in contact with a body region of the transistor; and

fabricating one or more switches on the substrate in correspondence of the one or more transistors with a first switch terminal of each of the one or more switches connected to the body terminal of a corresponding transistor and a second switch terminal of each of the one or more switches connected to a corresponding reference potential node;

fabricating a control circuit on the substrate, the control circuit operable to provide a switch de-activation signal for operating the one or more switches in correspondence of the one or more transistors to selectively disconnect the body terminal of each of the one or more transistors from the corresponding reference potential node, the switch de-activation signal being provided to the one or more switches upon detection of an RF signal in the semiconductor device,

wherein each of the one or more transistors comprises;

i) a first terminal in contact with a first region of the transistor;

ii) a second terminal in contact with a second region of the transistor;

iii) a third terminal configured, during operation of the transistor, to receive a voltage to control a conduction channel in a portion of a body region of the transistor between the first region and the second region; and

iv) the body terminal in contact with the body region.

32. The method according to claim 31, wherein the switch de-activation signal is provided to the one or more switches upon detection of the RF signal in at least one of a drain node, a source node, a gate node respectively in correspondence of the first terminal, the second terminal, and the third terminal of an input transistor of the stacked arrangement of one or more transistors.

33. A method of fabricating a semiconductor device, comprising:

fabricating a stacked arrangement of one or more transistors on a substrate, each of the one or more transistors having a body terminal in contact with a body region of the transistor; and

fabricating one or more switches on the substrate in correspondence of the one or more transistors with a first switch terminal of each of the one or more switches connected to the body terminal of a corresponding transistor and a second switch terminal of each of the one or more switches connected to a corresponding node,

wherein;

the corresponding node of the corresponding transistor different from an input transistor of the stacked arrangement is a source node of the corresponding transistor connected to a drain node of an adjacent transistor of the stacked arrangement,

the corresponding node of the input transistor is a reference potential node connected to a reference potential, and

each of the one or more transistors comprises;

i) a first terminal in contact with a first region of the transistor;

ii) a second terminal in contact with a second region of the transistor;

iii) a third terminal configured, during operation of the transistor, to receive a voltage to control a conduction channel in a portion of a body region of the transistor between the first region and the second region; and

iv) the body terminal in contact with the body region.

34. The method according to claim 33, wherein for the corresponding transistor different from the input transistor, the second switch terminal is connected to the corresponding node through a series connected inductor.

35. A semiconductor device, comprising:

a stacked arrangement of transistors that is fabricated on a substrate, each transistor of the stacked arrangement comprising;

i) a first terminal in contact with a first region of the transistor;

ii) a second terminal in contact with a second region of the transistor;

iii) a third terminal, configured, during operation of the transistor, to receive a voltage to control a conduction channel in a portion of a body region of the transistor between the first region and the second region; and

iv) a body terminal in contact with the body region; and

one or more switches in correspondence of one or more transistors from the stacked arrangement of transistors, each with a first switch terminal connected to the body terminal of a corresponding transistor from the one or more transistors, and a second switch terminal connected to a corresponding node, a closed condition and an open condition of the one or more switches being controlled by a control signal to provide a first operating characteristic in the corresponding transistor by connecting the body terminal of the corresponding transistor to the corresponding node when a corresponding switch is closed, and to provide a second operating characteristic in the corresponding transistor by disconnecting the body terminal from the corresponding node when the corresponding switch is open,

wherein;

the corresponding node of the corresponding transistor different from an input transistor of the stacked arrangement is a source node of the corresponding transistor connected to a drain node of an adjacent transistor of the stacked arrangement,

the corresponding node of the input transistor is a reference potential node connected to a reference potential, and

the first operating characteristic comprises a reduction in a leakage current between the first terminal and the second terminal, and

the second operating characteristic comprises an increase of a power added efficiency (PAE) of the transistor.