Yaw-rate sensor
First Claim
1. A sensor comprising:
- a substrate;
a plurality of movable masses that are mounted over a surface of the substrate and that include at least a first Coriolis element and a second Coriolis element;
a frame;
a plurality of detectors configured to detect deflections of the Coriolis elements, wherein the detected deflections include (a) detected deflections of at least the first Coriolis element, which are caused by a Coriolis force generated due to, and associated by the sensor with, an input motion about a first axis and (b) detected deflections of at least the second Coriolis element, which are caused by a Coriolis force generated due to, and associated by the sensor with, an input motion about a second axis that is perpendicular to the first axis;
a first spring that directly connects the first Coriolis element to the second Coriolis element; and
at least one second spring via which the frame is connected to at least one of the Coriolis elements, which the frame surrounds.
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Abstract
A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.
35 Citations
14 Claims
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1. A sensor comprising:
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a substrate; a plurality of movable masses that are mounted over a surface of the substrate and that include at least a first Coriolis element and a second Coriolis element; a frame; a plurality of detectors configured to detect deflections of the Coriolis elements, wherein the detected deflections include (a) detected deflections of at least the first Coriolis element, which are caused by a Coriolis force generated due to, and associated by the sensor with, an input motion about a first axis and (b) detected deflections of at least the second Coriolis element, which are caused by a Coriolis force generated due to, and associated by the sensor with, an input motion about a second axis that is perpendicular to the first axis; a first spring that directly connects the first Coriolis element to the second Coriolis element; and at least one second spring via which the frame is connected to at least one of the Coriolis elements, which the frame surrounds. - View Dependent Claims (2, 3, 4)
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5. A sensor comprising:
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a substrate; a plurality of movable masses that are mounted over a surface of the substrate; a frame; a plurality of detectors configured to detect deflections of the movable masses, the deflections including (a) deflections caused by a Coriolis force generated due to, and associated by the sensor with, an input motion about a first axis and (b) deflections caused by a Coriolis force generated due to, and associated by the sensor with, an input motion about a second axis that is perpendicular to the first axis; a first spring that directly connects two of the masses to each other; and at least one second spring via which the frame is connected to at least one of the two masses, to which the frame is external. - View Dependent Claims (6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification