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Method for correcting a signal backscattered by a sample and associated device

  • US 9,594,024 B2
  • Filed: 02/04/2016
  • Issued: 03/14/2017
  • Est. Priority Date: 02/06/2015
  • Status: Active Grant
First Claim
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1. A method for correcting an optical signal produced by a sample comprising the following steps:

  • illuminating a surface of the sample by a first light beam, produced by a first light source, said first light source being coupled to a first optical system, focusing said first light beam in an object focal plane of the first optical system, said object focal plane being situated, in the sample, at a measuring depth z from the surface of the sample; and

    measuring, with a first photodetector, of a first optical signal backscattered by the sample in response to the first light beam, the first photodetector producing a first measured signal representative of said first optical signal, a spatial filter being interposed between the first optical system and the first photodetector, the spatial filter comprising a window which transmits said first optical signal towards said first photodetector, the window being disposed in a conjugate focal plane of the object focal plane of the first optical system,wherein the method also comprises the following steps;

    determining an optical scattering property of the sample;

    applying a correction function to the first measured signal so as to generate a first corrected signal, said correction function taking into account said optical scattering property, andwherein the determination of the optical scattering property of the sample further comprises;

    performing a second illumination of a surface of the sample with a second light beam, so as to form, on said surface, an elementary illumination zone, corresponding to the part of said surface illuminated by said second light beam;

    detecting N second optical signals, backscattered by the sample, each second optical signal emanating from the surface of the sample at a backscattering distance from said elementary illumination zone, N being an integer greater than or equal to 1, so as to form as many second detected signals; and

    determining at least one optical scattering property of the sample, by comparison between;

    a function of each second detected signals, anda plurality of estimations of said function of each second detected signals, each estimation being carried out by considering a predetermined value of said optical scattering property.

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