Growing graphene on substrates

• US 9,595,436 B2
• Filed: 10/24/2013
• Issued: 03/14/2017
• Est. Priority Date: 10/25/2012
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Beasley, Cara, Hofmann, Ralf, Foad, Majeed A.
• Primary Examiner(s): Talbot, Brian K
• Application Number:
  US14/425,578
• Publication Number:
  US 20150235847A1
• Time in Patent Office: 1,237 Days
• Field of Search: 427/122, 427/288, 427/535, 427/553, 427/228
• US Class Current: 1/1
• CPC Class Codes: B05D 3/061 using U.V.
• CPC Class Codes: B05D 3/065 After-treatment
• CPC Class Codes: B05D 3/141 Plasma treatment
• CPC Class Codes: B05D 5/12 to obtain a coating with specific electrical properties
• CPC Class Codes: C01B 32/184 Preparation
• CPC Class Codes: C01B 32/186 by chemical vapour deposition [CVD]
• CPC Class Codes: H01L 21/02318 post-treatment
• CPC Class Codes: H01L 21/0234 treatment by exposure to a plasma
• CPC Class Codes: H01L 21/02345 treatment by exposure to radiation, e.g. visible light
• CPC Class Codes: H01L 21/0237 Materials
• CPC Class Codes: H01L 21/02376 Carbon, e.g. diamond-like carbon
• CPC Class Codes: H01L 21/02527 Carbon, e.g. diamond-like carbon
• CPC Class Codes: H01L 21/02628 using solutions
• CPC Class Codes: H01L 21/02664 Aftertreatments planarisation in general H01L21/304
• CPC Class Codes: H01L 21/288 from a liquid, e.g. electrolytic deposition

Abstract

Embodiments described herein provide methods and apparatus for forming graphitic carbon such as graphene on a substrate. The method includes providing a precursor comprising a linear conjugated hydrocarbon, depositing a hydrocarbon layer from the precursor on the substrate, and forming graphene from the hydrocarbon layer by applying energy to the substrate. The precursor may include template molecules such as polynuclear aromatics, and may be deposited on the substrate by spinning on, by spraying, by flowing, by dipping, or by condensing. The energy may be applied as radiant energy, thermal energy, or plasma energy.

Claims

1. A method of growing graphitic carbon on a substrate, comprising:

providing a precursor comprising;

a linear conjugated hydrocarbon selected from 1,3-pentadiene, 1,3-hexadiene, 2,4-pentadiene, 2,4-hexadiene, and 1,3,5-heptatriene, and

a solvent;

depositing a hydrocarbon layer from the precursor on a substrate;

evaporating the solvent before applying energy to the hydrocarbon layer; and

forming a graphitic layer from the hydrocarbon layer by applying energy to the hydrocarbon layer.

2. The method of claim 1, wherein the precursor further comprises a polynuclear aromatic compound.

3. The method of claim 1, wherein the depositing a hydrocarbon layer comprises adhering molecules from the precursor to a surface of the substrate.

4. The method of claim 3, wherein the precursor further comprises a template.

5. The method of claim 4, wherein the precursor has a viscosity less than about 3.0 cP at room temperature.

6. The method of claim 1, wherein the depositing a hydrocarbon layer comprises applying the precursor to the substrate as a liquid.

7. The method of claim 1, wherein the energy is selected from the group consisting of UV energy, plasma energy, thermal energy, and combinations thereof.

8. The method of claim 1, wherein the precursor has a viscosity less than about 3.0 cP at room temperature.

9. The method of claim 1, wherein the precursor further comprises an oxygen-containing solvent.

10. The method of claim 9, wherein the hydrocarbon layer contains trace quantities of the oxygen-containing solvent.

11. The method of claim 1, wherein the graphitic carbon layer is at least about 80% graphene.

14. The method of claim 1, wherein the solvent is evaporated at a temperature of about 150°

C. or less.

16. The method of claim 1, wherein the solvent is an aprotic solvent.

17. The method of claim 16, wherein the aprotic solvent is benzene.

12. A method of forming graphene on a substrate, comprising:

providing a precursor comprising a linear unsaturated hydrocarbon selected from 1,3-pentadiene, 1,3-hexadiene, 2,4-pentadiene, 2,4-hexadiene, and 1,3,5-heptatriene, an aromatic hydrocarbon, and a solvent;

depositing molecules from the precursor on the substrate; and

evaporating the solvent before applying energy to the molecules; and

reacting the molecules to form graphene by applying energy to the molecules.

13. The method of claim 12, wherein the solvent is an oxygen-containing solvent.

15. The method of claim 12, wherein the solvent is evaporated at a temperature of about 150°

C. or less.

18. The method of claim 12, wherein the solvent is an aprotic solvent.

19. The method of claim 18, wherein the aprotic solvent is benzene.