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Method and structure of three dimensional CMOS transistors with hybrid crystal orientations

  • US 9,595,479 B2
  • Filed: 03/18/2014
  • Issued: 03/14/2017
  • Est. Priority Date: 07/08/2008
  • Status: Active Grant
First Claim
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1. A method for fabricating a three-dimensional integrated circuit device, the method comprising:

  • providing a first substrate having a first crystal orientation;

    forming at least one or more PMOS devices overlying the first substrate;

    forming a first dielectric layer overlying the one or more PMOS devices;

    providing a second substrate having a second crystal orientation;

    forming at least one or more NMOS devices overlying the second substrate;

    forming a second dielectric layer overlying the one or more NMOS devices; and

    coupling the first dielectric layer to the second dielectric layer to form a hybrid structure including the first substrate overlying the second substrate;

    forming a third dielectric layer overlying the hybrid structure; and

    forming a pressure sensing device overlying the third dielectric layer,wherein forming the pressure sensing device comprising;

    forming a diaphragm device having a first surface region facing and overlying the hybrid structure and a second surface region opposite the first surface region;

    forming at least one or more folded spring devices spatially disposed within a vicinity of the first surface region of the diaphragm device, each of the folded spring devices being operably coupled to the first surface region of the diaphragm device;

    forming two or more electrode devices operably coupled to the first surface region;

    forming a first cavity region provided between the first surface region and the hybrid structure, the first cavity region being substantially sealed and maintaining a predetermined environment; and

    forming a housing member provided overlying the second surface region of the diaphragm device to form a second cavity region between the housing member and the diaphragm device, the housing member comprising one or more fluid openings to allow fluid to move between the second cavity and a region outside of the housing member.

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