Tuning capacitance to enhance FET stack voltage withstand

• US 9,595,956 B2
• Filed: 10/14/2015
• Issued: 03/14/2017
• Est. Priority Date: 04/26/2007
• Status: Active Grant

• Current Assignee: pSemi Corporation (Murata Manufacturing Co Limited)
• Original Assignee: Peregrine Semiconductor Corporation (Murata Manufacturing Co Limited)
• Inventors: Englekirk, Robert Mark
• Primary Examiner(s): Patel, Reema
• Application Number:
  US14/883,122
• Publication Number:
  US 20160191050A1
• Time in Patent Office: 517 Days
• Field of Search: None
• US Class Current: 1/1
• CPC Class Codes: H01H 11/00 Apparatus or processes specially adapted for the manufacture of electric switches processes specially adapted for manufacture of rectilinearly movable switches having a plurality of operating members associated with different sets of contacts, e.g. keyboards, H01H13/88
• CPC Class Codes: H03K 17/102 in field-effect transistor switches
• CPC Class Codes: H03K 17/161 in field-effect transistor switches
• CPC Class Codes: H03K 17/6871 the output circuit comprising more than one controlled field-effect transistor
• CPC Class Codes: H03K 17/693 Switching arrangements with several input- or output-terminals, e.g. multiplexers, distributors logic circuits H03K19/00; code converters H03M5/00, H03M7/00
• CPC Class Codes: H03K 2017/066 Maximizing the OFF-resistance instead of minimizing the ON-resistance
• CPC Class Codes: Y10T 29/49105 Switch making

Abstract

An RF switch to controllably withstand an applied RF voltage Vsw, or a method of fabricating such a switch, which includes a string of series-connected constituent FETs with a node of the string between each pair of adjacent FETs. The method includes controlling capacitances between different nodes of the string to effectively tune the string capacitively, which will reduce the variance in the RF switch voltage distributed across each constituent FET, thereby enhancing switch breakdown voltage. Capacitances are controlled, for example, by disposing capacitive features between nodes of the string, and/or by varying design parameters of different constituent FETs. For each node, a sum of products of each significant capacitor by a proportion of Vsw appearing across it may be controlled to approximately zero.

Claims

1. A stacked transistor RF switch apparatus, comprising:

a transistor stack including a plurality of constituent transistors all coupled in series connection drain to source to form a series string for which internal nodes are those between adjacent transistors; and

at least one discrete physical capacitor element Ccomp coupled between an internal node and a parasitic drain capacitance of the series string of the stack, Ccomp having an impedance that is predominantly capacitive at primary frequencies of signals ordinarily controlled by the RF switch apparatus.

2. The RF switch apparatus of claim 1 wherein capacitances coupled to internal nodes of the stack series string are configured to effectively tune voltage distribution, in that a variance of Vds-off as distributed across all constituent transistors would increase if all distinct capacitor elements coupled to internal nodes were omitted.

3. The RF switch apparatus of claim 1 wherein the at least one discrete physical capacitor element Ccomp comprises a MIM (metal-insulator-metal) Ccomp capacitor.

4. The RF switch apparatus of claim 1, wherein the at least one discrete physical capacitor element Ccomp comprises a plurality of Ccomp capacitors, wherein the plurality of Ccomp capacitors are coupled to different internal nodes of the stack.

5. A stacked transistor RF switch apparatus, comprising:

a transistor stack including a plurality of constituent transistors all coupled in series connection drain to source to form a series string for which internal nodes are those between adjacent transistors, each constituent transistor having an intrinsic drain-source capacitance proportional to a transistor size of each constituent transistor and a total effective drain-source capacitance Cds comprising the intrinsic drain-source capacitance and additional capacitance, wherein the transistor size of each constituent transistor is fabricated to provide a provide a different Cds value for at least two constituent transistors.

6. The stacked transistor RF switch apparatus of claim 5, wherein the transistor size of each constituent transistor is fabricated to provide a provide Cds values that differ from each other by at least 2% for at least two constituent transistors.

7. The stacked transistor RF switch apparatus of claim 5, wherein the transistor size of each constituent transistor is fabricated to provide a provide Cds values that differ from each other by at least 5% for at least two constituent transistors.

8. The stacked transistor RF switch apparatus of claim 5, wherein the transistor size of each constituent transistor is fabricated to provide a provide Cds values that differ from each other by at least 10% for at least two constituent transistors.

9. The stacked transistor RF switch apparatus of claim 5, wherein parasitic drain capacitances are substantially coupled to an end node of the series string wherein the transistor size of each constituent transistor is larger than the transistor size of an adjacent constituent transistor located closer to the end node in the series string.

10. The stacked transistor RF switch apparatus of claim 9, further comprising at least one additional discrete capacitance disposed between at least one pair of adjacent internal nodes of the series string.

11. The stacked transistor RF switch apparatus of claim 10, wherein the at least one additional discrete capacitance comprises a metal-insulator-metal capacitor disposed on top of at least one constituent transistor.

12. The stacked transistor RF switch apparatus of claim 10, wherein the at least one additional discrete capacitance comprises a capacitance feature having an impedance that is predominantly capacitive at a primary frequency of a signal ordinarily switched by the RF switch apparatus.

13. A method of fabricating a stacked RF switch that includes a plurality of series connected constituent transistors in a series string for which internal nodes are those between each pair of adjacent transistors, wherein each constituent transistor has an intrinsic drain-source capacitance proportional to a transistor size of each constituent transistor and a total effective drain-source capacitance value Cds comprising the intrinsic drain-source capacitance and additional capacitance, the method comprising fabricating each constituent transistor with a transistor size such that the Cds values for at least two constituent transistors are different.

14. The method of claim 13, wherein at least two constituent transistors are fabricated to provide Cds values that differ from each other by at least 2%.

15. The method of claim 13, further comprising balancing charge injection for a particular internal node by estimating values of all significant capacitive elements coupled to the particular internal node, estimating a voltage across each such significant capacitive element, and fabricating the size of each constituent transistor coupled to the particular node to provide intrinsic drain-source capacitances to approximately zero a sum of the significant capacitance element values, as multiplied to reflect the corresponding estimated voltage.

16. The method of claim 15, further comprising approximately balancing charge injection for each of a majority of internal nodes of the RF switch stack.

17. The method of claim 13, wherein parasitic drain capacitances are substantially coupled to an end node of the series string, the method further comprising fabricating the transistor size of each constituent transistor to be larger than the transistor size of an adjacent constituent transistor located closer to the end node in the series string.

18. The method of claim 13, further comprising fabricating at least one additional discrete capacitance disposed between at least one pair of adjacent internal nodes of the series string.

19. The method of claim 18, wherein the at least one additional discrete capacitance comprises a capacitance feature having an impedance that is predominantly capacitive at a primary frequency of a signal ordinarily switched by the stacked RF switch.