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Angular velocity sensor, electronic apparatus, and moving object

  • US 9,599,469 B2
  • Filed: 10/30/2014
  • Issued: 03/21/2017
  • Est. Priority Date: 10/31/2013
  • Status: Active Grant
First Claim
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1. An angular velocity sensor comprising:

  • a fixing unit;

    a base portion;

    a supporting unit that supports the base portion with respect to the fixing unit;

    a vibration unit that is connected to the base portion;

    a detection unit that is connected to the base portion and vibrates by an action of a Coriolis force based on an angular velocity around a detection axis; and

    a detection circuit electrically connected to the detection unit,wherein a width of a detection frequency band of the detection circuit is f1 Hz,a detuning frequency corresponding to a difference between a resonance frequency of the vibration unit and a resonance frequency of the detection unit is tuned to f3 Hz,the supporting unit includes a plurality of beams each having a respective bending portion,a resonance frequency in a first rotational vibration mode in which a mass constituted by the base portion, the vibration unit, and the detection unit, rotationally vibrates around the detection axis with respect to the fixing unit in association with deformation of the supporting unit is tuned to f2 Hz,a resonance frequency in a second rotational vibration mode, having a phase opposite to that of the first rotational vibration mode, in which the mass constituted by the base portion, the vibration unit, and the detection unit rotationally vibrates around the detection axis with respect to the fixing unit in association with deformation of the supporting unit is tuned to f4 Hz, anda relation of f1<

    f2<

    f3<

    f4 or a relation of f1<

    f2<

    f4<

    f3 is satisfied.

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