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Dual use of a ring structure as gyroscope and accelerometer

  • US 9,599,471 B2
  • Filed: 11/03/2014
  • Issued: 03/21/2017
  • Est. Priority Date: 11/14/2013
  • Status: Active Grant
First Claim
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1. A method for detecting linear acceleration, the method comprising:

  • driving a resonator mass at a resonance frequency of a first mode by applying differential drive signals to a first opposing pair of drive electrodes arranged along a first axis in a plane of the resonator and a second opposing pair of drive electrodes arranged along a second axis in the plane of the resonator orthogonal to the first axis, the first mode characterized by a first mode amplitude;

    sensing the first mode amplitude using at least one opposing pair of drive-sense electrodes in the plane of the resonator, each of the drive-sense electrodes generating a signal; and

    deriving a linear acceleration based at least on a difference between signals of each opposing pair of drive-sense electrodes.

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