MEMS proof mass with split Z-axis portions
First Claim
1. A proof-mass structure for an accelerometer, the proof mass structure configured to couple to an adjacent layer using a single anchor, the proof mass structure comprising:
- a first z-axis portion configured to rotate about a first axis using a first hinge, the first axis parallel to an x-y plane orthogonal to a z-axis;
a second z-axis portion configured to rotate about a second axis using a second hinge, the second axis parallel to the x-y plane;
wherein the first z-axis portion is configured to rotate independent of the second z-axis portion;
a central portion coupled to the first z-axis portion and the second z-axis portion via the first hinge and the second hinge, respectively, the central portion configured to couple with the single anchor and to suspend the first z-axis portion and the second z-axis portion from an adjacent layer of the accelerometer, one or more moveable portions of an electrode coupled to a frame of the central portion;
wherein movement of the one or more moveable portions of the electrode is associated with movement of the frame resulting from either x-axis motion of the proof mass structure or y-axis motion of the proof mass structure;
wherein the first z-axis portion and the second z-axis portion are coupled to the single anchor via the frame.
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Abstract
This document discusses among other things apparatus and methods for a proof mass including split z-axis portions. An example proof mass can include a center portion configured to anchor the proof-mass to an adjacent layer, a first z-axis portion configure to rotate about a first axis using a first hinge, the first axis parallel to an x-y plane orthogonal to a z-axis, a second z-axis portion configure to rotate about a second axis using a second hinge, the second axis parallel to the x-y plane, wherein the first z-axis portion is configured to rotate independent of the second z-axis portion.
231 Citations
20 Claims
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1. A proof-mass structure for an accelerometer, the proof mass structure configured to couple to an adjacent layer using a single anchor, the proof mass structure comprising:
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a first z-axis portion configured to rotate about a first axis using a first hinge, the first axis parallel to an x-y plane orthogonal to a z-axis; a second z-axis portion configured to rotate about a second axis using a second hinge, the second axis parallel to the x-y plane; wherein the first z-axis portion is configured to rotate independent of the second z-axis portion; a central portion coupled to the first z-axis portion and the second z-axis portion via the first hinge and the second hinge, respectively, the central portion configured to couple with the single anchor and to suspend the first z-axis portion and the second z-axis portion from an adjacent layer of the accelerometer, one or more moveable portions of an electrode coupled to a frame of the central portion; wherein movement of the one or more moveable portions of the electrode is associated with movement of the frame resulting from either x-axis motion of the proof mass structure or y-axis motion of the proof mass structure; wherein the first z-axis portion and the second z-axis portion are coupled to the single anchor via the frame. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method comprising:
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suspending a proof mass structure of an accelerometer from an adjacent layer of an accelerometer using a single anchor and a central portion of the proof mass structure, the proof mass structure including a first z-axis portion and a second z-axis portion, wherein the first z-axis portion of the proof mass structure and the second z-axis portion of the proof mass structure are coupled to the central portion, wherein the suspending the proof mass structure includes suspending one or more additional proof mass portions of the proof mass structure and wherein the one or more additional proof mass portions include a moveable portion of an electrode coupled to a frame of the central portion, wherein movement of the one or more moveable portions of the electrode is associated with movement of the frame resulting from either x-axis motion of the proof mass structure or y-axis motion of the proof mass structure; accelerating the proof mass structure along a z-axis direction; rotating the first z-axis portion of the proof mass in a first rotational direction about a first axis lying in an x-y-plane using a first hinge, the rotation of the first z-axis portion of the proof mass responsive to the acceleration of the proof mass in the z-axis direction; and rotating the second z-axis portion of the proof mass in a second rotational direct about a second axis lying in an x-y-plane using a second hinge, the rotation of the second z-axis portion of the proof mass responsive to the acceleration of the proof mass in the z-axis direction; and wherein the first rotational direction is opposite the second rotational direction using a point of reference outside a perimeter of the proof mass.
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12. An apparatus comprising:
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a single proof mass accelerometer;
the single proof mass accelerometer including;a single accelerometer proof mass formed in the x-y plane of a device layer, the single proof mass including; a central portion including a frame and a single, central anchor configured to suspend the single proof-mass from an adjacent layer of the apparatus; a first z-axis portion configured to rotate about a first axis in the x-y plane using a first hinge, the first hinge coupled to the central portion; a second z-axis portion configure to rotate about a second axis in the x-y plane using a second hinge, the second hinge coupled to the central portion; and one or more moveable portions of an electrode coupled to the frame of the central portion, wherein movement of the one or more moveable portions of the electrode is associated with movement of the frame resulting from either x-axis motion of the proof mass structure or y-axis motion of the proof mass structure; and wherein the first z-axis portion is configured to rotate independent of the second z-axis portion. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20)
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Specification