3D thermal detection circuits and methods

• US 9,599,517 B2
• Filed: 10/17/2013
• Issued: 03/21/2017
• Est. Priority Date: 10/17/2013
• Status: Active Grant

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Liu, Szu-Lin, Horng, Jaw-Juinn, Peng, Yung-Chow
• Primary Examiner(s): LIN, ERICA S Y
• Application Number:
  US14/055,909
• Publication Number:
  US 20150110158A1
• Time in Patent Office: 1,251 Days
• Field of Search: None
• US Class Current: 1/1
• CPC Class Codes: G01K 7/20 in a specially-adapted circuit, e.g. bridge circuit
• CPC Class Codes: G01K 7/21 for modifying the output characteristic, e.g. linearising

Abstract

A circuit includes sensing circuitry including at least one sensing element configured to output at least one temperature-dependent voltage. A compare circuit is configured to generate at least one intermediate voltage in response to comparing the at least one temperature-dependent voltage to a feedback voltage. A control circuit is configured to generate at least one control signal in response to the intermediate voltage. A switching circuit is configured to couple a capacitor coupled to a feedback node to one of a first voltage supply and a second voltage supply in response to the at least one control signal to generate an output signal having a pulse width that is based on a temperature sensed by the sensing circuitry.

Claims

1. A circuit, comprising:

sensing circuitry including at least one sensing element configured to output at least one temperature-dependent voltage;

a compare circuit configured to generate at least one intermediate voltage in response to comparing the at least one temperature-dependent voltage to a feedback voltage;

a control circuit configured to generate at least one control signal in response to the intermediate voltage; and

a switching circuit configured to couple a capacitor coupled to a feedback node to one of a first voltage supply and a second voltage supply in response to the at least one control signal to generate an output signal having a pulse width that is based on a temperature sensed by the sensing circuitry,

wherein one of the at least one sensing element is disposed on a first layer of a three-dimensional integrated circuit, and wherein the compare circuit, the control circuit, and the switching circuit are disposed on a second layer of the three-dimensional integrated circuit.

2. The circuit of claim 1, wherein the at least one sensing element includes at least one resistor having a resistance that is based on a temperature of the at least one resistor.

3. The circuit of claim 1, wherein the control circuit includes a latch configured to receive a pair of intermediate voltages from the compare circuit and to output a pair of control signals in response.

4. The circuit of claim 3, wherein the switching circuit includes

a first transistor having a first source coupled to the first voltage supply, a first drain coupled to the feedback node, and a first gate configured to receive one of the control signals output from the control circuit;

and

a second transistor having a second source coupled to the second voltage supply, a second drain coupled to the feedback node, and a second gate configured to receive another of the control signals output from the control circuit.

5. The circuit of claim 4, wherein the compare circuit includes

a first comparator having a first input configured to receive a first temperature-dependent voltage from the sensing circuitry and a second input configured to receive the feedback voltage from the feedback node;

and

a second comparator having a third input configured to receive a second temperature-dependent voltage from the sensing circuitry and a fourth input configured to receive the feedback voltage from the feedback node.

6. The circuit of claim 5, wherein the at least one sensing circuitry includes

a first switch coupled to a first node disposed between a power supply node and a resistor of the at least one sensing element, the first switch configured to couple the first node to the first input of the first comparator;

and

a second switch coupled to a second node disposed between the resistor and a second resistor of the at least one sensing element, the second switch configured to couple the second node to the third input of the second comparator.

7. The circuit of claim 1, wherein the capacitor is a temperature insensitive capacitor.

8. A circuit, comprising:

sensing circuitry including at least one sensing element that includes first and second resistors configured to selectively output first and second temperature-dependent voltages;

a compare circuit, coupled to the sensing circuitry, and configured to generate first and second intermediate voltages in response to comparing the first and second temperature-dependent voltages, respectively, to a feedback voltage;

a control circuit, coupled to the compare circuit, and configured to generate first and second control signals in response to the first and second intermediate voltages; and

a switching circuit, coupled to the control circuit, and configured to generate an output signal based on a temperature sensed by the sensing circuitry,

wherein the at least one sensing element is disposed on a first layer of a three-dimensional integrated circuit, and wherein the compare circuit, the control circuit, and the switching circuit are disposed on a second layer of the three-dimensional integrated circuit.

9. The circuit of claim 8, wherein the first resistor has a first resistance that is based on a temperature of the first resistor, and the second resistor has a second resistance that is based on a temperature of the second resistor.

10. The circuit of claim 8, wherein the at least one sensing element is disposed on a first layer of a three-dimensional integrated circuit, and wherein the compare circuit, the control circuit, and the switching circuit are disposed on a second layer of the three-dimensional integrated circuit.

11. The circuit of claim 8, wherein the control circuit includes a latch configured to receive the first and second intermediate voltages from the compare circuit and to output the first and second control signals in response.

12. The circuit of claim 11, wherein the switching circuit includes:

a first transistor having a first source coupled to the first voltage supply, a first drain coupled to a feedback node, and a first gate configured to receive the first control signal output from the control circuit; and

a second transistor having a second source coupled to the second voltage supply, a second drain coupled to the feedback node, and a second gate configured to receive the second control signal output from the control circuit.

13. The circuit of claim 12, wherein the compare circuit includes:

a first comparator having a first input configured to receive the first temperature-dependent voltage from the sensing circuitry and a second input configured to receive the feedback voltage from the feedback node; and

a second comparator having a third input configured to receive the second temperature-dependent voltage from the sensing circuitry and a fourth input configured to receive the feedback voltage from the feedback node.

14. The circuit of claim 13, wherein the sensing circuitry further includes:

a first switch coupled to a first node disposed between a power supply node and the first resistor, the first switch configured to couple the first node to the first input of the first comparator; and

a second switch coupled to a second node disposed between the first and second resistors, the second switch configured to couple the second node to the third input of the second comparator.

15. The circuit of claim 14, wherein the at least one sensing element further includes a current source coupled between the power supply and the first node.

16. The circuit of claim 14, wherein each of the first and second switches includes a first transistor with a first type and a second transistor with a second type that are coupled to each other.

17. The circuit of claim 8, wherein the capacitor is a temperature insensitive capacitor.