Illumination optical system, exposure apparatus, device production method, and light polarization unit
First Claim
1. An illumination optical system which illuminates an illumination objective surface with a light from a light source, the illumination optical system comprising:
- a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane crossing an optical path of the light from the light source;
a relay optical system which is arranged on a light source side of the spatial light modulator and/or on an illumination objective surface side of the spatial light modulator, and which forms a conjugate plane optically conjugate with the predetermined plane;
a first polarization member which is arranged within the conjugate plane or in a vicinity of the conjugate plane and into which comes a first light of the light from the light source, the first light having a first polarization state, and which emits the first light having a second polarization state after changing a polarization state of the first light from the first polarization state to the second polarization state different than the first polarization state; and
a second polarization member which includes an incident surface into which comes the first light having the second polarization state transmitted via the first polarization member and a second light of the light from the light source, the second light having the first polarization state and having bypassed the first polarization member, and which emits the first light having a third polarization state after changing the polarization state of the first light from the second polarization state to the third polarization state different than the second polarization state and emits the second light having a fourth polarization state after changing the polarization state of the second light from the first polarization state to the fourth polarization state different than the first polarization state.
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Accused Products
Abstract
An illumination optical system which illuminates an illumination objective surface with a light from a light source. The illumination optical system includes a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane and controlled individually, and which forms a light intensity distribution in an illumination pupil of the illumination optical system; and a polarization unit which is arranged in a position optically conjugate with the predetermined plane, and which polarizes an incident light beam having a first and second partial light beams, coming into the polarization unit such that the first and second partial light beams have polarization states different from each other, and emits the polarized incident light beam as an outgoing light beam, wherein the polarization unit changes, in a cross section of the outgoing light beam, a ratio between a cross sectional areas of the first and second partial light beams.
24 Citations
23 Claims
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1. An illumination optical system which illuminates an illumination objective surface with a light from a light source, the illumination optical system comprising:
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a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane crossing an optical path of the light from the light source; a relay optical system which is arranged on a light source side of the spatial light modulator and/or on an illumination objective surface side of the spatial light modulator, and which forms a conjugate plane optically conjugate with the predetermined plane; a first polarization member which is arranged within the conjugate plane or in a vicinity of the conjugate plane and into which comes a first light of the light from the light source, the first light having a first polarization state, and which emits the first light having a second polarization state after changing a polarization state of the first light from the first polarization state to the second polarization state different than the first polarization state; and a second polarization member which includes an incident surface into which comes the first light having the second polarization state transmitted via the first polarization member and a second light of the light from the light source, the second light having the first polarization state and having bypassed the first polarization member, and which emits the first light having a third polarization state after changing the polarization state of the first light from the second polarization state to the third polarization state different than the second polarization state and emits the second light having a fourth polarization state after changing the polarization state of the second light from the first polarization state to the fourth polarization state different than the first polarization state. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. An illumination method for illuminating an illumination objective surface with a light from a light source, the method comprising the steps of:
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allowing the light from the light source to come into a plurality of optical elements arranged on a predetermined plane; allowing a light from the plurality of optical elements to come into a plane optically conjugate with the predetermined plane via a relay optical system; changing a polarization state of a first light included in a light from the relay optical system from a first polarization state to a second polarization state different than the first polarization state by transmitting the first light through a first polarization member; changing the polarization state of the first light having the second polarization state from the second polarization state to a third polarization state different than the second polarization state by transmitting the first light through a second polarization member; changing a polarization state of a second light, different than the first light, included in the light from the relay optical system from the first polarization state to a fourth polarization state different than the first and second polarization states by transmitting the second light through the second polarization member; and illuminating the illumination objective surface with the first light having the third polarization state and the second light having the fourth polarization state. - View Dependent Claims (19, 20)
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21. An illumination method for illuminating an illumination objective surface with a light from a light source, the method comprising the steps of:
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changing a polarization state of a first light included in the light from the light source from a first polarization state to a second polarization state different than the first polarization state by transmitting the first light through a first polarization member; changing the polarization state of the first light having the second polarization state from the second polarization state to a third polarization state different than the second polarization state by transmitting the first light through a second polarization member; changing a polarization state of a second light, different than the first light, included in the light from the light source from the first polarization state to a fourth polarization state different than the first and second polarization states by transmitting the second light through the second polarization member; allowing the first light having the third polarization state and the second light having the fourth polarization state to come into a plurality of optical elements via a relay optical system, the plurality of optical elements being arranged on a plane optically conjugate with a plane within which the first polarization member is arranged, and illuminating the illumination objective surface with a light transmitted via the plurality of optical elements. - View Dependent Claims (22, 23)
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Specification