Mechanical resonating structures including a temperature compensation structure
First Claim
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1. A device, comprising:
- a substrate having a cavity formed therein; and
a mechanical resonating structure suspended above the cavity and coupled to the substrate by an anchor, the mechanical resonating structure comprisinga multi-layer active layer comprising a piezoelectric functional layer and a non-functional layer; and
a temperature compensating structure coupled to the active layer and comprising first, second and third layers, the second layer being between the first and third layers,wherein the first and third layers of the temperature compensating structure are formed of silicon oxide and have a stiffness that increases with increasing temperature over a temperature range, and wherein the second layer of the temperature compensating structure is formed of a semiconductor material.
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Abstract
Mechanical resonating structures are described, as well as related devices and methods. The mechanical resonating structures may have a compensating structure for compensating temperature variations.
71 Citations
14 Claims
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1. A device, comprising:
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a substrate having a cavity formed therein; and a mechanical resonating structure suspended above the cavity and coupled to the substrate by an anchor, the mechanical resonating structure comprising a multi-layer active layer comprising a piezoelectric functional layer and a non-functional layer; and a temperature compensating structure coupled to the active layer and comprising first, second and third layers, the second layer being between the first and third layers, wherein the first and third layers of the temperature compensating structure are formed of silicon oxide and have a stiffness that increases with increasing temperature over a temperature range, and wherein the second layer of the temperature compensating structure is formed of a semiconductor material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A device, comprising:
a mechanical resonating structure suspended above a cavity in a substrate and coupled to the substrate by an anchor, the mechanical resonating structure comprising an active layer of a piezoelectric material; a crystal orientation layer; an electrode disposed between the active layer and the crystal orientation layer; and a temperature compensating structure coupled to the active layer such that the crystal orientation layer is between the electrode and the temperature compensating structure, wherein the temperature compensating structure comprises first, second and third layers, the second layer being between the first and third layers, wherein the first and third layers of the temperature compensating structure are formed of silicon oxide and have a stiffness that increases with increasing temperature over a temperature range, and wherein the second layer of the temperature compensating structure is formed of a semiconductor material. - View Dependent Claims (11, 12, 13, 14)
Specification