Gas enclosure systems and methods utilizing an auxiliary enclosure

• US 9,604,245 B2
• Filed: 03/11/2014
• Issued: 03/28/2017
• Est. Priority Date: 06/13/2008
• Status: Active Grant

• Current Assignee: Kateeva, Inc.
• Original Assignee: Kateeva, Inc.
• Inventors: Mauck, Justin, Ko, Alexander Sou-Kang, Vronsky, Eliyahu, Alderson, Shandon
• Primary Examiner(s): Tadesse, Yewebdar
• Application Number:
  US14/205,340
• Publication Number:
  US 20140311405A1
• Time in Patent Office: 1,113 Days
• Field of Search: 118/50, 118/300, 118313-315, 118/305, 427/66
• US Class Current: 1/1
• CPC Class Codes: B05C 15/00 Enclosures for apparatus; Booths spray booths B05B16/00
• CPC Class Codes: B23P 6/00 Restoring or reconditioning objects straightening or restoring form of sheet metal, metal rods, metal tubes, metal profiles, or specific articles made therefrom B21D1/00, B21D3/00; repairing defective or damaged objects by casting techniques B22D19/10
• CPC Class Codes: B41J 2/01 Ink jet
• CPC Class Codes: B41J 29/02 Framework
• CPC Class Codes: B41J 29/17 Cleaning arrangements
• CPC Class Codes: F24F 3/163 Clean air work stations, i.e. selected areas within a space which filtered air is passed
• CPC Class Codes: H01L 21/6719 characterized by the construction of the processing chambers, e.g. modular processing chambers
• CPC Class Codes: Y10T 29/49721 with disassembling

Abstract

The present teachings disclose various embodiments of a gas enclosure system can have a gas enclosure that can include a printing system enclosure and an auxiliary enclosure. In various embodiments of a gas enclosure system of the present teachings, a printing system enclosure can be isolated from an auxiliary enclosure. Various systems and methods of the present teachings can provide for the ongoing management of a printing system by utilizing various embodiments of isolatable enclosures. For example, various measurement and maintenance process steps for the management of a printhead assembly can be performed in an auxiliary enclosure, which can be isolated from a printing system enclosure of a gas enclosure system, thereby preventing or minimizing interruption of a printing process.

Claims

1. A gas enclosure system comprising:

a gas enclosure comprising;

a printing system enclosure defining a first volume, the printing system enclosure being operably coupled to an environmental control system, the environment control system being configured to provide a controlled processing environment for the first volume;

an auxiliary enclosure defining a second volume, the auxiliary enclosure being operably coupled to the environmental control system, the environmental control system being configured to provide a controlled processing environment for the second volume;

wherein the gas enclosure has a first sealable opening allowing access between the printing system enclosure and the auxiliary enclosure and a second sealable opening allowing access to the auxiliary enclosure from the exterior of the gas enclosure;

an industrial printing system housed within the printing system enclosure comprising;

a printhead assembly comprising at least one printhead device;

a substrate support apparatus for supporting a substrate; and

a motion system for the relative positioning of the printhead assembly with respect to the substrate; and

a handler located in the gas enclosure, wherein the location of the handler is proximal the first opening to enable the handler to perform operations requiring movement between the printing system enclosure and the auxiliary enclosure; and

a printhead management system housed within the auxiliary enclosure.

2. The gas enclosure system of claim 1, wherein the controlled processing environment of the first volume of the printing system comprises a gas environment maintained as an inert gas environment.

3. The gas enclosure system of claim 2, wherein the inert gas environment of the first volume is maintained using gases selected from nitrogen, any of the noble gases, and combinations thereof.

4. The gas enclosure system of claim 2, wherein the inert gas environment contained in the interior of the printing system enclosure comprises water and oxygen each at levels of 100 ppm or less.

5. The gas enclosure system of claim 2, wherein the inert gas environment contained in the interior of the printing system enclosure comprises water and oxygen each at levels of 1 ppm or less.

6. The gas enclosure system of claim 1, wherein the second volume of the auxiliary enclosure is between about 1% to about 10% of the total volume of the gas enclosure.

7. The gas enclosure system of claim 1, wherein the handler has an end effector.

8. The gas enclosure system of claim 7, wherein the end effector is selected from a blade-type end effector, a gripper-type end effector and a clamp-type effector.

9. The gas enclosure system of claim 1, wherein the handler is located in the printing system enclosure defining the first volume.

10. The gas enclosure system of claim 1, wherein the handler is located in the auxiliary enclosure defining a second volume.

11. The gas enclosure system of claim 1, wherein the auxiliary enclosure defining a second volume is constructed as a section of the gas enclosure.

14. The gas enclosure system of claim 1, wherein the auxiliary enclosure defining a second volume is a transfer chamber.

15. The gas enclosure system of claim 1, wherein the auxiliary enclosure is a load lock chamber.

16. The gas enclosure system of claim 1, wherein the substrate support apparatus can support a substrate having a size of between about generation 3.5 to about generation 10.

17. The gas enclosure system of claim 1, wherein the substrate support apparatus can support a substrate having a size of between about generation 5 to about generation 8.5.

18. The gas enclosure system of claim 1, wherein the substrate support apparatus is a floatation table.

19. The gas enclosure system of claim 1, wherein the environmental control system is configured to provide a controlled processing environment of the second volume that differs from an environment exterior to the gas enclosure system.

20. The gas enclosure system of claim 1, wherein the environmental control system is configured to provide a different controlled processing environment for the second volume of the auxiliary enclosure than the controlled processing environment of the first volume of the printing system enclosure.

21. The gas enclosure system of claim 1, wherein the environmental control system is configured to provide the same controlled processing environment for the second volume of the auxiliary enclosure as provided for the controlled processing environment of the first volume of the printing system enclosure.

12. The gas enclosure system of 1, wherein the auxiliary enclosure defining a second volume is an adaptable controlled-environment enclosure.

13. The gas enclosure system of claim 12, wherein the adaptable controlled-environment enclosure is readily movable.