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Inertial force sensor

  • US 9,605,963 B2
  • Filed: 01/16/2015
  • Issued: 03/28/2017
  • Est. Priority Date: 01/24/2006
  • Status: Active Grant
First Claim
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1. An inertial force sensor comprising:

  • a detecting device which detects an inertial force wherein the detecting device includes;

    a supporting portion,a first support beam and a second support beam which are each connected to the supporting portion and extend along a first axis,a first beam portion, a second beam portion, a third beam portion and a fourth beam portion which are each connected to the supporting portion, the first beam portion and the second beam portion each connected to the first support beam, the third beam portion and the fourth beam portion each connected to the second support beam, the first beam portion and the second beam portion being symmetrical about the first axis, the third beam portion and the fourth beam portion being symmetrical about the first axis, the first beam portion and the third beam portion being symmetrical about a second axis perpendicular to the first axis, and the second beam portion and the fourth beam portion being symmetrical about the second axis,wherein each of the first, second, third, and fourth beam portions has a bend such that the beam portions extend in a direction away from the supporting portion, andwherein the first beam portion, the second beam portion, the third beam portion and the fourth beam portion are each inclined at an acute angle relative to the first axis.

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