Probe card and method for testing magnetic sensors
First Claim
1. A method of testing a magnetic sensor with a probe card including a plurality of probe tips and first and second pairs of non-coaxial coils, comprising:
- applying a first magnetic field to the magnetic sensor with the first pair of non-coaxial coils positioned on first opposed sides of the plurality of probe tips, wherein each coil of the first pair of non-coaxial coils includes a longitudinal axis;
sensing a first output from the magnetic sensor;
applying a second magnetic field to the magnetic sensor with the second pair of non-coaxial coils positioned on second opposed sides of the plurality of probe tips, the second magnetic field being orthogonal to the first magnetic field at the magnetic sensor, wherein each coil of the second pair of non-coaxial coils includes a longitudinal axis, and wherein the longitudinal axes of the first pair of non-coaxial coils are disposed orthogonally to the longitudinal axes of the second pair of non-coaxial coils; and
sensing a second output from the magnetic sensor.
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Accused Products
Abstract
A probe card and method are provided for testing magnetic sensors at the wafer level. The probe card has one or more probe tips having a first pair of solenoid coils in parallel configuration on first opposed sides of each probe tip to supply a magnetic field in a first (X) direction, a second pair of solenoid coils in parallel configuration on second opposed sides of each probe tip to supply a magnetic field in a second (Y) direction orthogonal to the first direction, and an optional third solenoid coil enclosing or inscribing the first and second pair to supply a magnetic field in a third direction (Z) orthogonal to both the first and second directions. The first pair, second pair, and third coil are each symmetrical with a point on the probe tip array, the point being aligned with and positioned close to a magnetic sensor during test.
13 Citations
18 Claims
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1. A method of testing a magnetic sensor with a probe card including a plurality of probe tips and first and second pairs of non-coaxial coils, comprising:
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applying a first magnetic field to the magnetic sensor with the first pair of non-coaxial coils positioned on first opposed sides of the plurality of probe tips, wherein each coil of the first pair of non-coaxial coils includes a longitudinal axis; sensing a first output from the magnetic sensor; applying a second magnetic field to the magnetic sensor with the second pair of non-coaxial coils positioned on second opposed sides of the plurality of probe tips, the second magnetic field being orthogonal to the first magnetic field at the magnetic sensor, wherein each coil of the second pair of non-coaxial coils includes a longitudinal axis, and wherein the longitudinal axes of the first pair of non-coaxial coils are disposed orthogonally to the longitudinal axes of the second pair of non-coaxial coils; and sensing a second output from the magnetic sensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification