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Optical apparatus

  • US 9,606,341 B2
  • Filed: 11/15/2013
  • Issued: 03/28/2017
  • Est. Priority Date: 12/05/2012
  • Status: Active Grant
First Claim
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1. An optical apparatus comprising:

  • a laser light source;

    an objective configured to irradiate a sample with laser light from the laser light source;

    a phase-modulation spatial light modulator located at a position optically conjugate to a pupil position of the objective and configured to modulate a phase of the laser light;

    a scan unit configured to scan the sample with the laser light so as to generate an image of the sample;

    a detector configured to detect observation light from the sample;

    an image generating unit configured to generate the image of the sample according to a signal from the detector and control information of the scan unit; and

    a controlling unit configured to set, for the phase-modulation spatial light modulator, a modulation amount of modulation of the phase of the laser light in accordance with a pattern to be formed on the sample using the laser light,wherein based on a coefficient of coordinate transformation calculated according to the pattern to be formed on the sample and a pattern of irradiation with the laser light obtained from the image generated by the image generating unit, the controlling unit corrects the modulation amount that is set for the phase-modulation spatial light modulator.

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