Optical apparatus
First Claim
1. An optical apparatus comprising:
- a laser light source;
an objective configured to irradiate a sample with laser light from the laser light source;
a phase-modulation spatial light modulator located at a position optically conjugate to a pupil position of the objective and configured to modulate a phase of the laser light;
a scan unit configured to scan the sample with the laser light so as to generate an image of the sample;
a detector configured to detect observation light from the sample;
an image generating unit configured to generate the image of the sample according to a signal from the detector and control information of the scan unit; and
a controlling unit configured to set, for the phase-modulation spatial light modulator, a modulation amount of modulation of the phase of the laser light in accordance with a pattern to be formed on the sample using the laser light,wherein based on a coefficient of coordinate transformation calculated according to the pattern to be formed on the sample and a pattern of irradiation with the laser light obtained from the image generated by the image generating unit, the controlling unit corrects the modulation amount that is set for the phase-modulation spatial light modulator.
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Accused Products
Abstract
An optical apparatus includes: laser; objective that irradiates a sample with laser light; phase-modulation spatial light modulator that is located at a pupil conjugate position of the objective and modulates a phase of the laser light; scan unit that scans the sample with the laser light; detector that detects observation light from the sample; image generating unit that generates a sample image according to a signal from the detector and control information of the scan unit; and controlling unit that sets for the modulator a modulation amount of the phase of laser light in accordance with a pattern to be formed on the sample using the laser light. According to the pattern to be formed on the sample and a pattern of irradiation with the laser light obtained from the image generated by the image generating unit, the controlling unit corrects the modulation amount that is set for the modulator.
27 Citations
11 Claims
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1. An optical apparatus comprising:
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a laser light source; an objective configured to irradiate a sample with laser light from the laser light source; a phase-modulation spatial light modulator located at a position optically conjugate to a pupil position of the objective and configured to modulate a phase of the laser light; a scan unit configured to scan the sample with the laser light so as to generate an image of the sample; a detector configured to detect observation light from the sample; an image generating unit configured to generate the image of the sample according to a signal from the detector and control information of the scan unit; and a controlling unit configured to set, for the phase-modulation spatial light modulator, a modulation amount of modulation of the phase of the laser light in accordance with a pattern to be formed on the sample using the laser light, wherein based on a coefficient of coordinate transformation calculated according to the pattern to be formed on the sample and a pattern of irradiation with the laser light obtained from the image generated by the image generating unit, the controlling unit corrects the modulation amount that is set for the phase-modulation spatial light modulator. - View Dependent Claims (2, 4, 5, 6, 7, 8, 10, 11)
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3. An optical apparatus comprising:
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a laser light source; an objective configured to irradiate a sample with laser light from the laser light source; a phase-modulation spatial light modulator located at a position optically conjugate to a pupil position of the objective and configured to modulate a phase of the laser light; a scan unit configured to scan the sample with the laser light so as to generate an image of the sample; a detector configured to detect observation light from the sample; an image generating unit configured to generate the image of the sample according to a signal from the detector and control information of the scan unit; and a controlling unit configured to set, for the phase-modulation spatial light modulator, a modulation amount of modulation of the phase of the laser light in accordance with a pattern to be formed on the sample using the laser light, wherein according to the pattern to be formed on the sample and a pattern of irradiation with the laser light obtained from the image generated by the image generating unit, the controlling unit corrects the modulation amount that is set for the phase-modulation spatial light modulator, wherein the scan unit is positioned between the objective and the phase-modulation spatial light modulator, and wherein the controlling unit;
(i) sets, for the phase-modulation spatial light modulator, the modulation amount corresponding to a pattern of laser-light irradiation of a position shifted from a reference position on the sample, the pattern of laser-light irradiation being the pattern to be formed on the sample, (ii) obtains the pattern of irradiation with the laser light from the image which the image generating unit generates via the scan unit scanning the sample with the laser light, and (iii) according to the pattern to be formed on the sample and the pattern of irradiation with the laser light, corrects the modulation amount to be set for the phase-modulation spatial light modulator.
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9. An optical apparatus comprising:
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a laser light source; an objective configured to irradiate a sample with laser light from the laser light source; a phase-modulation spatial light modulator located at a position optically conjugate to a pupil position of the objective and configured to modulate a phase of the laser light; a scan unit configured to scan the sample with the laser light so as to generate an image of the sample; a detector configured to detect observation light from the sample; an image generating unit configured to generate the image of the sample according to a signal from the detector and control information of the scan unit; and a controlling unit configured to set, for the phase-modulation spatial light modulator, a modulation amount of modulation of the phase of the laser light in accordance with a pattern to be formed on the sample using the laser light, wherein according to the pattern to be formed on the sample and a pattern of irradiation with the laser light obtained from the image generated by the image generating unit, the controlling unit corrects the modulation amount that is set for the phase-modulation spatial light modulator, wherein the optical apparatus further comprises a storage unit configured to store, for each wavelength of the laser light, a correction parameter calculated according to the pattern to be formed on the sample and the pattern of irradiation with the laser light obtained from the image generated by the image generating unit, wherein according to the correction parameter corresponding to a given wavelength of the laser light from among the correction parameters stored in the storage unit, the controlling unit corrects the modulation amount that is set for the phase-modulation spatial light modulator, and wherein the correction parameter is a coefficient of coordinate transformation calculated according to the pattern to be formed on the sample and the pattern of irradiation with the laser light obtained from the image generated by the image generating unit.
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Specification