Film induced interface roughening and method of producing the same

• US 9,611,133 B2
• Filed: 03/24/2015
• Issued: 04/04/2017
• Est. Priority Date: 09/11/2014
• Status: Active Grant

• Current Assignee: Invensense Incorporated (TDK Corporation)
• Original Assignee: Invensense Incorporated (TDK Corporation)
• Inventors: Liu, Fang, Lim, Martin, Shin, Jong Il, Shin, Jongwoo
• Primary Examiner(s): Oh, Jaehwan
• Application Number:
  US14/667,169
• Publication Number:
  US 20160115016A1
• Time in Patent Office: 742 Days
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2201/0242 Gyroscopes
• CPC Class Codes: B81B 3/001 Structures having a reduced contact area, e.g. with bumps or with a textured surface
• CPC Class Codes: B81C 2201/115 Roughening a surface
• CPC Class Codes: B81C 2203/0792 Forming interconnections between the electronic processing unit and the micromechanical structure

Abstract

Various embodiments provide for a method for roughening a surface of a MEMs device or the surface of a CMOS surface. A first material can be deposited in a thin layer over a surface made of a second material. After heating, the first and second materials, they can partially melt and interdiffuse, forming an alloy. The first material can then be removed and the alloy is removed at the same time. The surface of the second material that is left behind has then been roughened due to the interdiffusion of the first and second materials.

Claims

1. A method for roughening a surface, comprising:

layering a first material over a first surface of a second material having a first roughness, wherein the first material and the second material are different materials;

interdiffusing a portion of the first material and the second material at a predetermined temperature, wherein the interdiffusing results in formation of a eutectic alloy layer formed between the first material and the second material; and

removing the first material, wherein the removing results in a second surface of the eutectic alloy layer having a second roughness that is greater than the first roughness.

2. The method of claim 1, wherein the first material is germanium and the second material is silicon.

3. The method of claim 1, wherein the first material is aluminum and the second material is silicon.

4. The method of claim 1, wherein the first material is aluminum and the second material is germanium.

5. The method of claim 2, further comprising:

patterning the germanium on an interconnect point for bonding to a wafer.

6. The method of claim 5, wherein the wafer comprises electronic circuits.

7. The method of claim 3, further comprising:

depositing the germanium on an interconnect point of a third surface of a first wafer and patterning the germanium for bonding to a second wafer.

8. The method of claim 7, wherein the second wafer is

a microelectromechanical systems (MEMS) wafer.

9. The method of claim 1, further comprising:

patterning the second material, wherein the first material is layered after the patterning of the second material.

10. The method of claim 1, wherein the interdiffusing comprises heating the portion to a determined temperature that is lower than melting temperatures of the first material and the second material.

11. The method of claim 2, wherein the interdiffusing comprises

heating the portion to at least 700°

C.

12. The method of claim 3, wherein the interdiffusing comprises

heating the portion to at least 600°

C.

13. The method of claim 4, wherein the interdiffusing comprises

heating the portion to at least 400°

C.

14. The method of claim 1, further comprising:

removing the eutectic alloy layer, wherein the removing the eutectic alloy layer results in the first surface having a third roughness that is greater than the first roughness.

15. A method, comprising:

depositing a film of germanium over a silicon surface having a first roughness;

heating the film of germanium and the silicon surface to a predetermined temperature, wherein a first portion of germanium and a second portion of silicon are interdiffused, forming a eutectic germanium-silicon alloy layer; and

removing the film of germanium, wherein the removing results in exposing a surface having a second roughness that is greater than the first roughness.

16. The method of claim 15, wherein the heating comprises heating the film of germanium and the silicon surface to the predetermined temperature that is lower than melting temperatures of germanium and silicon.

17. The method of claim 16, wherein the heating comprises heating the film of germanium and the silicon surface to at least 700°

C.

18. The method of claim 15, further comprising:

patterning the film of germanium on an interconnect point on the silicon surface for bonding to a wafer.

19. The method of claim 18, further comprising:

removing the eutectic germanium-silicon alloy layer, wherein the removing the eutectic germanium-silicon alloy layer results in exposure of the silicon surface having a third roughness that is greater than the first roughness.

20. A method to roughen a surface, comprising:

depositing a film of aluminum over a silicon surface having a first roughness;

heating the film of aluminum and the silicon surface to a predetermined temperature;

annealing a first portion of the film of aluminum and a second portion of silicon wherein the first portion of aluminum and the second portion of silicon are interdiffused forming a eutectic aluminum-silicon alloy layer; and

removing the film of aluminum, wherein the removing results in exposing a surface having a second roughness that is greater than the first roughness.

21. The method of claim 20, wherein the heating comprises heating the film of aluminum and the silicon surface to at least 600°

C.

22. The method of claim 20, further comprising:

depositing a layer of germanium over an interconnect point; and

patterning the germanium on the interconnect point for bonding to a microelectromechanical systems (MEMS) wafer.

23. A method, comprising:

depositing a film of aluminum over a germanium surface having a first roughness;

heating the film of aluminum and the germanium surface to a defined temperature, wherein the heating results in a combination of a first portion of the film of aluminum and a second portion of germanium surface at a boundary layer between the film and the germanium surface melt to form a eutectic aluminum-germanium alloy; and

removing the film of aluminum, wherein the removing results in exposure of a surface having a second roughness that is greater than the first roughness.

24. The method of claim 23, wherein the removing comprises removing the film of aluminum and the eutectic aluminum-germanium alloy via an etching process.

25. The method of claim 23, wherein the heating comprises heating the film of aluminum and the germanium surface to at least 400°

C.

26. The method of claim 23, wherein the germanium is deposited over a silicon substrate.

27. The method of claim 26, where the silicon substrate comprises electronics circuit.

28. The method of claim 23, wherein the germanium is deposited over a patterned silicon nitride layer.