Surface-enhanced raman scattering element

• US 9,612,201 B2
• Filed: 08/09/2013
• Issued: 04/04/2017
• Est. Priority Date: 08/10/2012
• Status: Active Grant

• Current Assignee: Hamamatsu Photonics KK
• Original Assignee: Hamamatsu Photonics KK
• Inventors: Ito, Masashi, Shibayama, Katsumi, Hirose, Masaki, Maruyama, Yoshihiro
• Primary Examiner(s): Geisel, Kara E
• Assistant Examiner(s): DECENZO, SHAWN H
• Application Number:
  US14/420,458
• Publication Number:
  US 20150212001A1
• Time in Patent Office: 1,334 Days
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G01N 21/03 Cuvette constructions
• CPC Class Codes: G01N 21/658 enhancement Raman, e.g. surface plasmons
• CPC Class Codes: G01N 2201/068 Optics, miscellaneous

Abstract

A surface-enhanced Raman scattering element comprises a substrate having a principal surface; a molded layer having a support part formed on the principal surface of the substrate so as to extend along the principal surface and a fine structure part formed on the support part; and a conductor layer formed on the fine structure part and constituting an optical functional part for generating surface-enhanced Raman scattering; the molded layer being relatively thinner in a direction intersecting the principal surface of the substrate at an outer edge part of a fine structure area formed with the fine structure part in the molded layer than at a center part of the fine structure area.

Claims

1. A surface-enhanced Raman scattering element comprising:

a substrate having a principal surface;

a molded layer having a support part formed on the principal surface of the substrate so as to extend along the principal surface and a fine structure part formed on the support part; and

a conductor layer formed on the fine structure part and constituting an optical functional part for generating surface-enhanced Raman scattering;

wherein the molded layer is relatively thinner in a direction intersecting the principal surface of the substrate at an outer edge part of a fine structure area formed with the fine structure part in the molded layer than at a center part of the fine structure area,

the fine structure part is formed integrally with the support part, and consists of projections arranged into a two-dimensional array on the support part, and

the thickness of the molded layer in a projection formed in the center part of the fine structure area is greater than the thickness of the molded layer in a projection formed in the outer edge part of the fine structure area.

2. A surface-enhanced Raman scattering element according to claim 1,

wherein the projections have a forming density relatively lower at the center part of the fine structure area than at the outer edge part thereof.

3. A surface-enhanced Raman scattering element according to claim 1, wherein the molded layer is made relatively thinner in the direction intersecting the principal surface of the substrate at the outer edge part of the fine structure area than at the center part of the fine structure area due to a gradient in thickness of the support part.

4. A surface-enhanced Raman scattering element according to claim 1, wherein the fine structure part is formed all over the principal surface of the substrate.

5. A surface-enhanced Raman scattering element according to claim 1, further comprising a frame part formed on the principal surface of the substrate so as to surround at least the support part along the principal surface of the substrate.

6. A surface-enhanced Raman scattering element according to claim 5, wherein the frame part has a height from the principal surface of the substrate smaller than that of the fine structure part from the principal surface of the substrate.