Miniature RF and microwave components and methods for fabricating such components
First Claim
1. A coaxial waveguide, comprising:
- a center conductor;
an outer conductor comprising one or more walls, spaced apart from and disposed around the center conductor;
one or more dielectric support members for supporting the center conductor in contact with the center conductor and partially embedded within the outer conductor; and
a core volume between the center conductor and the outer conductor, wherein the core volume is under vacuum or in a gas state.
1 Assignment
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Accused Products
Abstract
RF and microwave radiation directing or controlling components are provided that may be monolithic, that may be formed from a plurality of electrodeposition operations and/or from a plurality of deposited layers of material, that may include switches, inductors, antennae, transmission lines, filters, hybrid couplers, antenna arrays and/or other active or passive components. Components may include non-radiation-entry and non-radiation-exit channels that are useful in separating sacrificial materials from structural materials. Preferred formation processes use electrochemical fabrication techniques (e.g. including selective depositions, bulk depositions, etching operations and planarization operations) and post-deposition processes (e.g. selective etching operations and/or back filling operations).
136 Citations
20 Claims
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1. A coaxial waveguide, comprising:
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a center conductor; an outer conductor comprising one or more walls, spaced apart from and disposed around the center conductor; one or more dielectric support members for supporting the center conductor in contact with the center conductor and partially embedded within the outer conductor; and a core volume between the center conductor and the outer conductor, wherein the core volume is under vacuum or in a gas state. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A three-dimensional microstructure formed by a sequential build process, comprising:
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a first microstructural element formed of a first material; and a second microstructural element formed of a second material different from the first material; a third microstructural element formed of a third material that is different from the second material; wherein the second microstructural element comprises an anchoring portion embedded in the first microstructural element and contacting the third microstructural element for mechanically locking the first microstructural element to third microstructural element via the second microstructural element. - View Dependent Claims (15, 16, 17, 18, 19)
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20. A three-dimensional microstructure formed by a sequential build process, comprising:
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a first microstructural element formed of a first material; and a second microstructural element formed of a second material different from the first material; wherein the first or second microstructural element comprises an anchoring portion embedded in the other of the first or second microstructural element for mechanically locking the first microstructural element to the second microstructural element, wherein the anchoring portion includes a change in cross-section so as to provide locking.
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Specification