MEMS anti-phase vibratory gyroscope

• US 9,618,342 B2
• Filed: 05/06/2014
• Issued: 04/11/2017
• Est. Priority Date: 06/05/2013
• Status: Active Grant

• Current Assignee: Chinese Academy of Sciences
• Original Assignee: Institute of Microelectronics Chinese Academy of Sciences
• Inventors: Yu, Lian Zhong, Sun, Chen
• Primary Examiner(s): Martin, Laura
• Assistant Examiner(s): Campbell, Irving A
• Application Number:
  US14/270,596
• Publication Number:
  US 20160238390A1
• Time in Patent Office: 1,071 Days
• Field of Search: 7350402, 7350414
• CPC Class Codes: B81B 2201/0242 Gyroscopes
• CPC Class Codes: B81B 2203/0118 Cantilevers
• CPC Class Codes: B81B 2203/0136 Comb structures
• CPC Class Codes: B81B 3/0048 Constitution or structural means for controlling angular deflection not provided for in groups B81B3/0043 - B81B3/0045
• CPC Class Codes: B81C 1/00531 Dry etching
• CPC Class Codes: B81C 2201/0132 Dry etching, i.e. plasma etching, barrel etching, reactive ion etching [RIE], sputter etching or ion milling
• CPC Class Codes: B81C 2201/0159 Lithographic techniques not provided for in B81C2201/0157
• CPC Class Codes: B81C 2201/0176 Chemical vapour Deposition
• CPC Class Codes: B81C 2203/0118 Bonding a wafer on the substrate, i.e. where the cap consists of another wafer
• CPC Class Codes: G01C 19/574 the devices having two sensing masses in anti-phase motion
• CPC Class Codes: G01C 19/5747 each sensing mass being connected to a driving mass, e.g. driving frames
• CPC Class Codes: G01C 19/5769 Manufacturing; Mounting; Housings

Abstract

A MEMS anti-phase vibratory gyroscope includes two measurement masses with a top cap and a bottom cap each coupled with a respective measurement mass. The measurement masses are oppositely coupled with each other in the vertical direction. Each measurement mass includes an outer frame, an inner frame located within the outer frame, and a mass located within the inner frame. The two measurement masses are coupled with each other through the outer frame. The inner frame is coupled with the outer frame by a plurality of first elastic beams. The mass is coupled with the inner frame by a plurality of second elastic beams. A comb coupling structure is provided along opposite sides of the outer frame and the inner frame. The two masses vibrate toward the opposite direction, and the comb coupling structure measures the angular velocity of rotation.

Claims

1. A MEMS anti-phase vibratory gyroscope, comprising:

two measurement structures, each measurement structure including an outer frame, an inner frame located within the outer frame, and a mass located within the inner frame, wherein the two measurement structures are coupled with each other in the vertical direction through the outer frame, the inner frame is coupled with the outer frame by a plurality of first elastic beams, and the mass is coupled with the inner frame by a plurality of second elastic beams;

a top cap and a bottom cap, each coupled with a respective one of the measurement structures; and

a comb structure provided along opposite sides of the outer frame and the inner frame;

wherein the two masses vibrate toward the opposite vertical direction, and the comb structure measures the angular velocity of rotation.

2. The gyroscope of claim 1, wherein the first elastic beams are provided between the inner frame and the outer frame and are symmetrically provided with respect to the midline of the mass.

3. The gyroscope of claim 1, wherein a gap space is formed between the inner frame and the outer frame, the first elastic beams are provided within the gap space, and the first elastic beams can move freely within the gap space.

4. The gyroscope of claim 1, wherein the first elastic beams are U-shape folded beams.

5. The gyroscope of claim 1, wherein the second elastic beams are provided between the mass and the inner frame, each second elastic beam comprises two elastic beams with a Y-shape, each Y-shape elastic beam includes one main body part and two branch parts, the two branch parts are respectively coupled with the inner frame and the mass.

6. The gyroscope of claim 5, wherein the main body parts of the two Y-shape elastic beams include end portions provided at the corner of the inner frame, and the two end portions are connected to each other at a right angle.

7. The gyroscope of claim 1, wherein the thickness of the first elastic beam is larger than the thickness of the second elastic beam.

8. The gyroscope of claim 1, wherein the measurement structure has a silicon on insulator structure which includes a top silicon layer and a bottom silicon layer, with a buried oxide layer provided between the two silicon layers, and an epilayer is formed on the surface of the top silicon layer.

9. The gyroscope of claim 8, wherein the first elastic beams are formed in the epilayer and the top silicon layer, and the second elastic beams are formed in the epilayer.

10. The gyroscope of claim 1, wherein electrodes are provided on the mass and the comb structure.

11. The gyroscope of claim 1, wherein the top cap and bottom cap are formed from a silicon wafer or a glass wafer.

12. A MEMS anti-phase vibratory gyroscope, comprising:

a top measurement structure and a bottom measurement structure, each measurement structure contained within a separate outer frame, each measurement structure having an inner frame, a mass, a plurality of first elastic beams and a plurality of second elastic beams, wherein each of the first elastic beams is coupled with the inner frame and the outer frame, and wherein each of the second elastic beams is coupled with the inner frame and the mass,

a top cap coupled with the top measurement mass;

a bottom cap coupled with the bottom measurement mass; and

a comb structure provided along opposite sides of the outer frame and the inner frame, wherein the masses vibrate toward the opposite vertical direction, and the comb structure measures the angular velocity of rotation.