Pressure sensor device
First Claim
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1. A pressure sensor device comprising:
- a thin film bendable by a pressure;
a support which fixes the thin film and has a thickness larger than a thickness of the thin film;
a sensor on the thin film, the sensor comprising;
a first electrode on the thin film,a second electrode,a reference layer between the first electrode and the second electrode,a free layer between the reference layer and the first electrode or between the reference layer and the second electrode, anda spacer layer between the reference layer and the free layer,wherein the magnetization of the free layer is changeable when the thin film is bent; and
a shield on the support, the shield comprising a soft magnetic material,wherein the sensor is arranged between a first part of the shield and a second part of the shield in a first direction, the first direction extending along a wider surface of the thin film, and wherein the soft magnetic material of the shield is formed entirely outside the thin film such that the soft magnetic material of the shield does not overlap the thin film in a direction perpendicular to the wider surface of the thin film.
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Abstract
A pressure sensor device comprises a support substrate including a thin film area which is bendable by a pressure, a sensor film comprising a first electrode provided on the thin film area, a second electrode provided on the first electrode, a reference layer provided between the first electrode and the second electrode, a free layer provided between the reference layer and the first electrode or between the reference layer and the second electrode, a spacer layer provided between the reference layer and the free layer, a shield provided on a side of the support substrate.
10 Citations
18 Claims
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1. A pressure sensor device comprising:
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a thin film bendable by a pressure; a support which fixes the thin film and has a thickness larger than a thickness of the thin film; a sensor on the thin film, the sensor comprising; a first electrode on the thin film, a second electrode, a reference layer between the first electrode and the second electrode, a free layer between the reference layer and the first electrode or between the reference layer and the second electrode, and a spacer layer between the reference layer and the free layer, wherein the magnetization of the free layer is changeable when the thin film is bent; and a shield on the support, the shield comprising a soft magnetic material, wherein the sensor is arranged between a first part of the shield and a second part of the shield in a first direction, the first direction extending along a wider surface of the thin film, and wherein the soft magnetic material of the shield is formed entirely outside the thin film such that the soft magnetic material of the shield does not overlap the thin film in a direction perpendicular to the wider surface of the thin film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A pressure sensor comprising:
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a thin film bendable by a pressure; a support which fixes the thin film and has a thickness larger than a thickness of the thin film; a sensor on the thin film, the sensor comprising; a first electrode on the thin film, a second electrode, a reference layer between the first electrode and the second electrode, a free layer between the reference layer and the first electrode or between the reference layer and the second electrode, and a spacer layer between the reference layer and the free layer, wherein the magnetization of the free layer is changeable when the thin film is bent; and a shield on the support, the shield comprising a soft magnetic material, wherein the sensor and a first part of the shield are arranged along a first direction, the first direction extending along a wider surface of the thin film, the sensor and a second part of the shield are arranged along a second direction, the second direction having a direction which is perpendicular to the first direction, the second direction extending along the wider surface of the thin film, and the soft magnetic material of the shield is formed entirely outside the thin film such that the soft magnetic material of the shield does not overlap the thin film in a direction perpendicular to the wider surface of the thin film. - View Dependent Claims (18)
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Specification