End effectors and reticle handling at a high throughput

• US 9,618,857 B2
• Filed: 06/15/2015
• Issued: 04/11/2017
• Est. Priority Date: 02/28/2015
• Status: Active Grant

• Current Assignee: KLA-Tencor Corporation (KLA Corporation)
• Original Assignee: KLA-Tencor Corporation (KLA Corporation)
• Inventors: Volkov, Igor, Men, Daniel, Amzaleg, Oshri
• Primary Examiner(s): KRAMER, DEAN J
• Application Number:
  US14/739,621
• Publication Number:
  US 20160252826A1
• Time in Patent Office: 666 Days
• Field of Search: 2941191
• CPC Class Codes: B25J 15/0014 having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
• CPC Class Codes: B25J 15/0253 comprising parallel grippers
• CPC Class Codes: G03F 7/70741 Handling masks outside exposure position, e.g. reticle libraries
• CPC Class Codes: H01L 21/68728 characterised by a plurality of separate clamping members, e.g. clamping fingers

Abstract

End effectors of reticle mechanical interface pods as well as reticle handling methods are provided, which handle the reticle by the end effector by applying a lateral force and/or a downward force on the reticle during the handling to fixate the reticle to at least two supports (e.g., at least four fingers) which are attached to at least two arms of the end effector and are configured to apply an upwards force on the reticle. Hence the reticle is fixated to the end effector and can be handled with higher accelerations and at a higher throughput than current methods. End effectors may have multiple fingers to fixate the reticle, and on more pushers may apply a downwards force to further fixate the reticle to the supports.

Claims

1. A method for handling a reticle, comprising the steps of:

positioning first and second fingers for an end effector beyond a reticle in an upward vertical direction;

positioning first and second pushers for the end effector above the reticle in the upward vertical direction and between the first and second fingers;

moving the first and second fingers in a downward vertical direction, opposite the upward vertical direction;

positioning the first and second fingers beyond the reticle in the downward vertical direction;

moving the first and second pushers in the downward vertical direction;

contacting the reticle with the first and second pushers;

moving the first and second fingers in the upward vertical direction;

applying, with the first and second fingers, force on the reticle in the upward vertical direction; and

,

applying a lateral force, with the first and second fingers, longitudinally or transversally with respect to the end effector.

2. The method of claim 1, further comprising:

positioning third and fourth fingers for the end effector beyond the reticle in the upward vertical direction;

positioning the first and second pushers for the end effector above the reticle in the upward vertical direction and between the third and fourth fingers;

moving the third and fourth fingers in the downward vertical direction, opposite the upward vertical direction;

positioning the third and fourth fingers beyond the reticle in the downward vertical direction;

moving the third and fourth fingers in the upward vertical direction; and

,

applying, with the third and fourth fingers, force on the reticle in the upward vertical direction.

3. The method of claim 1, further comprising applying a downwards force on the reticle by the first and second pushers.

4. An end effector, comprising:

first and second fingers; and

,

a pusher fork comprising first and second pushers,

wherein the first and second pushers are positionable above a reticle in the upward vertical direction and between the first and second fingers;

the first and second fingers are movable in a downward vertical direction, opposite the upward vertical direction;

the first and second pushers are movable in the downward vertical direction to contact and apply a downward force on the reticle; and

, the first and second fingers are movable in the upward vertical direction and a lateral direction, to apply an upward vertical force on the reticle in the upward vertical direction and apply a lateral force on the reticle longitudinally or transversally with respect to the end effector.

5. The end effector of claim 4, further comprising:

third and fourth fingers, wherein;

the third and fourth fingers are movable in a downward vertical direction, opposite the upward vertical direction;

the first and second pushers are positionable between the third and fourth fingers; and

,

the third and fourth fingers are movable in the upward vertical direction to apply force on the reticle in the upward vertical direction.

6. An end effector for handling a reticle, the end effector comprising:

first and second fingers; and

,

a pusher fork comprising first and second pushers,

wherein the first and second fingers are positionable beyond a reticle in an upward vertical direction;

the first and second pushers are positionable above the reticle in the upward vertical direction and between the first and second fingers;

the first and second fingers are movable in a downward vertical direction beyond the reticle in the downward vertical direction, while remaining laterally beyond the reticle;

following the movement in the downward vertical direction, the first and second fingers are moveable in a lateral direction, longitudinally or transversally with respect to the reticle;

the first and second pushers are movable in the downward vertical direction to contact and apply a downward force on the reticle; and

, the respective fingers are movable in the upward vertical direction and the lateral direction, to apply an upward vertical force on the reticle in the upward vertical direction and apply a lateral force on the reticle, longitudinally or transversally with respect to the reticle.

7. The end effector of claim 6, wherein at least one pusher is located on each of at least one pusher fork arm, the at least one pusher configured to contact and press against a reticle top surface upon a downwards movement of the end effector, wherein the first and second fingers are configured to fixate the reticle against the at least one pusher upon consequent upwards movement of the end effector.

8. The end effector of claim 7, further comprising:

third and fourth fingers, wherein;

the third and fourth fingers are positionable beyond the reticle in an upward vertical direction;

the first and second pushers are positionable between the third and fourth fingers;

the third and fourth fingers are movable in a downward vertical direction beyond the reticle in the downward vertical direction, while remaining laterally beyond the reticle;

following the movement in the downward vertical direction, the third and fourth fingers are moveable only laterally toward the reticle; and

,

the third and fourth fingers are movable in the upward vertical direction to apply force on the reticle in the upward vertical direction.

9. A method for handling a reticle, comprising the steps of:

positioning first and second fingers for an end effector beyond a reticle in an upward vertical direction;

positioning first and second pushers for the end effector above the reticle in the upward vertical direction and between the first and second fingers;

moving the first and second fingers in a downward vertical direction, opposite the upward vertical direction, while the first and second fingers remain laterally beyond the reticle;

positioning the first and second fingers beyond the reticle in the downward vertical direction;

moving the first and second pushers in the downward vertical direction;

contacting the reticle with the first and second pushers;

moving the first and second fingers in a lateral direction, longitudinally or transversally with respect to the end effector;

applying, with the first and second fingers, force on the reticle in the lateral direction, longitudinally or transversally with respect to the reticle;

moving the first and second fingers in the upward vertical direction; and

,

applying, with the first and second fingers, force on the reticle in the upward vertical direction.