Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists

• US 9,620,397 B2
• Filed: 06/30/2015
• Issued: 04/11/2017
• Est. Priority Date: 06/19/2002
• Status: Expired due to Term

• Current Assignee: Murata Machinery Limited (Muratec)
• Original Assignee: Murata Machinery Limited (Muratec)
• Inventors: Doherty, Brian J., Mariano, Thomas R., Sullivan, Robert P.
• Primary Examiner(s): MYERS, GLENN F
• Application Number:
  US14/788,173
• Publication Number:
  US 20150303088A1
• Time in Patent Office: 651 Days
• CPC Class Codes: B65G 1/0457 with suspended load carriers
• CPC Class Codes: H01L 21/67733 Overhead conveying
• CPC Class Codes: H01L 21/67736 Loading to or unloading from a conveyor
• CPC Class Codes: H01L 21/67769 Storage means

Abstract

A highly efficient Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load and unload Work-In-Process (WIP) parts directly to/from one or more WIP storage units included in the system. The AMHS includes an overhead hoist transport subsystem and at least one vertical carousel stocker having a plurality of storage bins. The overhead hoist transport subsystem includes an overhead hoist transport vehicle traveling along a suspended track defining a predetermined route, which runs adjacent to the carousel stocker, thereby allowing the overhead hoist transport vehicle to access a WIP part directly from one of the storage bins. At least one of the storage bins includes a movable shelf operative to move laterally from a first position along the carousel path to a second position near the overhead hoist transport vehicle.

Claims

1. A method, comprising:

moving a moveable stage of an overhead hoist transport vehicle along a horizontal axis from a first position beneath an overhead rail to a second position adjacent to a side of the OHT vehicle; and

moving, by a hoist coupled to the moveable stage, a gripper along a vertical axis to a position that is directly below the moveable stage, wherein the gripper is configured to hold a material unit;

obtaining, by a gripper of the overhead transport (OTH) vehicle, the material unit from a suspended shelf;

moving, by the overhead transport vehicle, the material unit held by the gripper from a starting position to an ending position wherein the starting position comprises a horizontal starting position and a vertical starting position, and the ending position comprises a horizontal ending position and a vertical ending position;

wherein the hoist is configured to move the gripper along the vertical axis to a position that is directly below the moveable stage, when the moveable stage is in the first position; and

wherein the hoist is configured to move the gripper along the vertical axis to a position that is directly below the moveable stage, when the moveable stage is in the second position that is adjacent to a side of the OHT vehicle;

wherein the moveable stage is further configured to move the material unit configured to be held by the gripper from the horizontal starting position to the horizontal ending position, and the hoist is configured to move the material unit from the vertical starting position to the vertical ending position;

wherein the starting position is at the suspended shelf and the ending position is the first position.

2. The method of claim 1, wherein the moveable stage is configured to move without rotating the gripper and the material unit.

3. The method of claim 1, wherein the moveable stage is further configured to move the gripper along the horizontal axis to a third position on the opposite side of the OHT vehicle.

4. The method of claim 1, wherein the hoist is configured to move the gripper from the first position vertically to a work station.

5. The method of claim 4, wherein the workstation comprises a 300 mm load port.

6. The method of claim 1, wherein the movable stage and the gripper are configured to work in concert to move the gripper to a storage location.

7. The method of claim 1, wherein the material unit comprises a 300 mm front-opening unified pod.

8. The method of claim 1, wherein the hoist is configured to move the gripper from the second position vertically to a storage location.

9. The method of claim 8, wherein the storage location comprises the suspended shelf.

10. The method of claim 1, wherein the moveable stage is configured to move without rotating the gripper and the material unit.

11. The method of claim 1, wherein the moveable stage is further configured to move the gripper along the horizontal axis to a third position on the opposite side of the OHT vehicle.

12. A method comprising:

obtaining, by a gripper of an overhead transport (OTH) vehicle, a material unit from a suspended shelf;

moving, by the overhead transport vehicle, the material unit held by the gripper from a starting position to an ending position wherein the starting position comprises a horizontal starting position and a vertical starting position, and the ending position comprises a horizontal ending position and a vertical ending position;

wherein the overhead hoist transport (OHT) vehicle is coupled to an overhead rail in a semiconductor fabrication plant, and wherein the OHT vehicle comprises;

the gripper configured to hold the material unit;

a moveable stage coupled to the gripper, wherein the moveable stage is configured to move the gripper along a horizontal axis from a first position beneath the overhead rail to a second position adjacent to a side of the OHT vehicle; and

a hoist coupled to the movable stage and to the gripper, wherein the hoist is configured to move the gripper along a vertical axis to a position that is directly below the moveable stage;

wherein the hoist is configured to move the gripper along the vertical axis to a position that is directly below the moveable stage when the moveable stage is in the first position;

wherein the hoist is configured to move the gripper along the vertical axis to a position that is directly below the moveable stage when the moveable stage is in the second position that is adjacent to the side of the OHT vehicle;

wherein the moveable stage is further configured to move the material unit configured to be held by the gripper from the horizontal starting position to the horizontal ending position, and the hoist is configured to move the material unit from the vertical starting position to the vertical ending position;

wherein the starting position is at the suspended shelf and the ending position is the first position.

13. The method of claim 12, further comprising releasing the material unit at the ending position.

14. The method of claim 12, wherein the starting position is at the OHT vehicle and the ending position is at a 300 mm process tool load port.

15. The method of claim 14, further comprising releasing the material unit at the 300 mm process tool load port.

16. The method of claim 12, wherein the second position is at a conveyer.

17. The method of claim 12, wherein the starting position and the ending position are on opposite sides of the OHT vehicle.

18. The method of claim 12, wherein moving the material unit comprises:

moving the material unit from the starting position to the first position;

moving to a new location along the track; and

subsequent to reaching the new location, moving the material unit the ending position.