Organic light emitting display devices and methods of manufacturing organic light emitting display devices
First Claim
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1. An organic light emitting display device having an opaque region and a transparent region, which comprises:
- a substrate;
a first transistor disposed on the substrate in the opaque region;
a second transistor disposed on the substrate in the opaque region, the second transistor being adjacent to the first transistor; and
a capacitor disposed on the substrate in the opaque region, the capacitor being adjacent to the first transistor,wherein the capacitor includes a first capacitor electrode, a dielectric structure including silicon oxynitride and a second capacitor electrode,wherein the first transistor comprises;
a first active pattern disposed on the substrate in the opaque region;
a first gate insulation layer disposed on the first active pattern, the first gate insulation layer extending into the transparent region;
a second gate insulation layer including silicon oxynitride disposed on the first gate insulation layer, the second gate insulation layer extending into the transparent region;
a first gate electrode disposed on the second gate insulation layer;
a first source electrode contacting the first active pattern, the first source electrode extending along a first direction parallel to the substrate; and
a first drain electrode contacting the first active pattern, wherein the second transistor comprises;
a second active pattern disposed on the substrate in the opaque region;
the first gate insulation layer being disposed on the second active pattern;
a second gate electrode disposed on the first gate insulation layer;
the second gate insulation layer being disposed on the second gate electrode; and
a second source electrode and a second drain electrode contacting the second active pattern.
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Abstract
An organic light emitting display device includes a substrate, a first transistor disposed on the substrate in the opaque region, a second transistor disposed on the substrate in the opaque region, the second transistor being adjacent to the first transistor along a first direction, and a capacitor disposed on the substrate in the opaque region, the capacitor being adjacent to the first transistor along a second direction different from the first direction. Here, the capacitor may include a first capacitor electrode, a dielectric structure including silicon oxynitride and a second capacitor electrode.
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Citations
15 Claims
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1. An organic light emitting display device having an opaque region and a transparent region, which comprises:
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a substrate; a first transistor disposed on the substrate in the opaque region; a second transistor disposed on the substrate in the opaque region, the second transistor being adjacent to the first transistor; and a capacitor disposed on the substrate in the opaque region, the capacitor being adjacent to the first transistor, wherein the capacitor includes a first capacitor electrode, a dielectric structure including silicon oxynitride and a second capacitor electrode, wherein the first transistor comprises; a first active pattern disposed on the substrate in the opaque region; a first gate insulation layer disposed on the first active pattern, the first gate insulation layer extending into the transparent region; a second gate insulation layer including silicon oxynitride disposed on the first gate insulation layer, the second gate insulation layer extending into the transparent region; a first gate electrode disposed on the second gate insulation layer; a first source electrode contacting the first active pattern, the first source electrode extending along a first direction parallel to the substrate; and a first drain electrode contacting the first active pattern, wherein the second transistor comprises; a second active pattern disposed on the substrate in the opaque region; the first gate insulation layer being disposed on the second active pattern; a second gate electrode disposed on the first gate insulation layer; the second gate insulation layer being disposed on the second gate electrode; and a second source electrode and a second drain electrode contacting the second active pattern. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 15)
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11. A method of manufacturing an organic light emitting display device including an opaque region and a transparent region, which comprises:
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forming a first transistor on a substrate in the opaque region; forming a second transistor on the substrate in the opaque region, the second transistor being adjacent to the first transistor; and forming a capacitor on the substrate in the opaque region, the capacitor being adjacent to the first transistor, wherein the capacitor includes a first capacitor electrode, a dielectric structure including silicon oxynitride and a second capacitor electrode, wherein forming the first transistor comprises; forming a first active pattern on the substrate in the opaque region; forming a first gate insulation layer covering the first active pattern and extending into the transparent region; forming a second gate insulation layer including silicon oxynitride on the first gate insulation layer, the second gate insulation layer extending into the transparent region; forming a first gate electrode on the second gate insulation layer; forming a first source electrode contacting the first active pattern and extending along a first direction parallel to the substrate; and forming a first drain electrode contacting the first active pattern, wherein the second gate insulation layer and the dielectric structure are simultaneously formed, and the first gate electrode and the second capacitor electrode are simultaneously formed, wherein forming the second transistor comprises; forming a second active pattern on the substrate in the opaque region; forming the first gate insulation layer covering the second active pattern; forming a second gate electrode on the first gate insulation layer; forming the second gate insulation layer covering the second gate electrode; forming a second source electrode contacting the second active pattern; and forming a second drain electrode contacting the second active pattern, wherein the second gate electrode and the first capacitor electrode are simultaneously formed. - View Dependent Claims (12, 13, 14)
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Specification