Display device and manufacturing method thereof
First Claim
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1. A display device comprising:
- a substrate;
a semiconductor layer over the substrate;
a gate insulating layer over the semiconductor layer;
a gate electrode over the gate insulating layer;
a first insulating layer over the gate electrode; and
a second insulating layer comprising organic material over the first insulating layer,wherein the gate electrode comprises a first layer comprising titanium and a second layer comprising copper,wherein the second layer is over the first layer,wherein the second insulating layer comprises a rounded portion in a vertical cross-sectional view of the second insulting layer, andwherein the second layer is narrower than the first layer.
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Abstract
It is an object of the present invention to prevent an influence of voltage drop due to wiring resistance, trouble in writing of a signal into a pixel, and trouble in gray scales, and provide a display device with higher definition, represented by an EL display device and a liquid crystal display device. In the present invention, a wiring including Cu is provided as an electrode or a wiring used for the display device represented by the EL display device and the liquid crystal display device. Besides, sputtering is performed with a mask to form the wiring including Cu. With such structure, it is possible to reduce the voltage drop and a deadened signal.
81 Citations
20 Claims
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1. A display device comprising:
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a substrate; a semiconductor layer over the substrate; a gate insulating layer over the semiconductor layer; a gate electrode over the gate insulating layer; a first insulating layer over the gate electrode; and a second insulating layer comprising organic material over the first insulating layer, wherein the gate electrode comprises a first layer comprising titanium and a second layer comprising copper, wherein the second layer is over the first layer, wherein the second insulating layer comprises a rounded portion in a vertical cross-sectional view of the second insulting layer, and wherein the second layer is narrower than the first layer. - View Dependent Claims (2, 3, 4)
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5. A display device comprising:
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a substrate; a semiconductor layer over the substrate; a gate electrode adjacent to the semiconductor layer with a gate insulating layer interposed therebetween; a first insulating layer over the gate electrode; and a second insulating layer comprising organic material over the first insulating layer, wherein the gate electrode comprises a first layer comprising titanium and a second layer comprising copper, wherein the second layer is over the first layer, wherein the second insulating layer comprises a rounded portion in a vertical cross-sectional view of the second insulating layer, and wherein the second layer is narrower than the first layer. - View Dependent Claims (6, 7, 8, 9)
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10. A display device comprising:
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a substrate; a semiconductor layer over the substrate; a gate electrode adjacent to the semiconductor layer with a gate insulating layer interposed therebetween; a wiring over the semiconductor layer; a first insulating layer over the wiring; and a second insulating layer comprising organic material over the first insulating layer, wherein the wiring comprises a first layer comprising titanium and a second layer comprising copper, wherein the second layer is over the first layer, wherein the second insulating layer comprises a rounded portion in a vertical cross-sectional view of the second insulating layer, and wherein the second layer is narrower than the first layer. - View Dependent Claims (11, 12, 13, 14, 15)
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16. A display device comprising:
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a substrate; a semiconductor layer over the substrate; a gate electrode adjacent to the semiconductor layer with a gate insulating layer interposed therebetween; a wiring over the semiconductor layer; a first insulating layer over the wiring; and a second insulating layer comprising organic material over the first insulating layer, wherein the wiring comprises a first layer comprising titanium and a second layer comprising copper, wherein the second layer is over the first layer, wherein the second insulating layer comprises a rounded portion in a vertical cross-sectional view of the second insulating layer, wherein the second layer is narrower than the first layer, and wherein a portion of a top surface of the first layer is not overlapped with the second layer. - View Dependent Claims (17, 18, 19, 20)
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Specification