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Micro pick up array pivot mount with integrated strain sensing elements

  • US 9,624,100 B2
  • Filed: 06/12/2014
  • Issued: 04/18/2017
  • Est. Priority Date: 06/12/2014
  • Status: Active Grant
First Claim
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1. A pivot mount comprising:

  • a pivot platform;

    a base;

    a plurality of spring arms, each spring arm fixed to the pivot platform at a corresponding inner root, and fixed to the base at a corresponding outer root;

    wherein each spring arm includes;

    a switch-back along an axial length of the spring arm such that a pair of first and second lengths of the spring arm immediately adjacent the switch-back are parallel to each other;

    a first strain sensing element at the first length; and

    a second strain sensing element at the second length.

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