Micro pick up array pivot mount with integrated strain sensing elements
First Claim
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1. A pivot mount comprising:
- a pivot platform;
a base;
a plurality of spring arms, each spring arm fixed to the pivot platform at a corresponding inner root, and fixed to the base at a corresponding outer root;
wherein each spring arm includes;
a switch-back along an axial length of the spring arm such that a pair of first and second lengths of the spring arm immediately adjacent the switch-back are parallel to each other;
a first strain sensing element at the first length; and
a second strain sensing element at the second length.
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Abstract
Systems and methods for aligning a transfer head assembly with a substrate are disclosed. In an embodiment a pivot mount is used for generating a feedback signal in a closed-loop motion control system. In an embodiment, the pivot mount includes a plurality of spring arms, with each spring arm including a switch-back along an axial length of the spring arm such that a pair of first and second lengths of the spring arm are immediately adjacent the switch-back and are parallel to each other. A first strain sensing element is located at the first length, and a second strain sensing element is located at the second length.
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Citations
18 Claims
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1. A pivot mount comprising:
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a pivot platform; a base; a plurality of spring arms, each spring arm fixed to the pivot platform at a corresponding inner root, and fixed to the base at a corresponding outer root; wherein each spring arm includes; a switch-back along an axial length of the spring arm such that a pair of first and second lengths of the spring arm immediately adjacent the switch-back are parallel to each other; a first strain sensing element at the first length; and a second strain sensing element at the second length. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A pivot mount comprising:
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a pivot platform including a plurality of compliant voltage contacts; a clamping electrode on the pivot platform, wherein each compliant voltage contact protrudes from the pivot platform such that they are elevated above the pivot platform and the clamping electrode; a base; and a plurality of spring arms, each spring arm fixed to the pivot platform at a corresponding inner root, and fixed to the base at a corresponding outer root. - View Dependent Claims (13, 14)
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15. A transfer tool comprising:
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an articulating transfer head assembly; a pivot mount, mountable onto the articulating transfer head assembly comprising; a pivot platform; a base; a plurality of spring arms, each spring arm fixed to the pivot platform at a corresponding inner root, and fixed to the base at a corresponding outer root; wherein each spring arm includes; a switch-back along an axial length of the spring arm such that a pair of first and second lengths of the spring arm immediately adjacent the switch-back are parallel to each other; a first strain sensing element at the first length; a second strain sensing element at the second length; and a micro pick up array mountable onto the pivot platform of the pivot mount, the micro pick up array including an array of electrostatic transfer heads. - View Dependent Claims (16, 17, 18)
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Specification