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Stamp structures and transfer methods using the same

  • US 9,630,440 B2
  • Filed: 11/13/2013
  • Issued: 04/25/2017
  • Est. Priority Date: 11/14/2012
  • Status: Active Grant
First Claim
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1. A stamp structure comprising:

  • a stamp frame having a plate part and a membrane on one side of the plate part, the stamp frame including a plurality of holes passing through the plate part, the plate part including a rigid material, and the membrane including a material more flexible than the rigid material,wherein the plurality of holes are configured to facilitate the adsorption of an object to directly contact one of the plate part and the membrane during a transfer of the object from a donor substrate to a target substrate,wherein the plate part has a first and second surface, the first surface facing the object during the transfer of the object and the second surface opposite the first surface, andwherein the membrane contacts one of the first and second surfaces, the plurality of holes passing through the plate part and the membrane when the membrane contacts the first surface.

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