Stamp structures and transfer methods using the same
First Claim
Patent Images
1. A stamp structure comprising:
- a stamp frame having a plate part and a membrane on one side of the plate part, the stamp frame including a plurality of holes passing through the plate part, the plate part including a rigid material, and the membrane including a material more flexible than the rigid material,wherein the plurality of holes are configured to facilitate the adsorption of an object to directly contact one of the plate part and the membrane during a transfer of the object from a donor substrate to a target substrate,wherein the plate part has a first and second surface, the first surface facing the object during the transfer of the object and the second surface opposite the first surface, andwherein the membrane contacts one of the first and second surfaces, the plurality of holes passing through the plate part and the membrane when the membrane contacts the first surface.
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Accused Products
Abstract
A stamp structure includes a stamp frame having a plate part. The plate part includes a plurality of holes. The plurality of holes are configured to facilitate the adsorption of an object to the plate part during a transfer of the object from a donor substrate to a target substrate.
8 Citations
16 Claims
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1. A stamp structure comprising:
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a stamp frame having a plate part and a membrane on one side of the plate part, the stamp frame including a plurality of holes passing through the plate part, the plate part including a rigid material, and the membrane including a material more flexible than the rigid material, wherein the plurality of holes are configured to facilitate the adsorption of an object to directly contact one of the plate part and the membrane during a transfer of the object from a donor substrate to a target substrate, wherein the plate part has a first and second surface, the first surface facing the object during the transfer of the object and the second surface opposite the first surface, and wherein the membrane contacts one of the first and second surfaces, the plurality of holes passing through the plate part and the membrane when the membrane contacts the first surface. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A transfer method comprising:
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preparing a stamp structure, the stamp structure including a stamp frame, the stamp frame having a plate part and a membrane on one side of the plate part, the stamp frame including a plurality of holes passing through the plate part, the plate part including a rigid material and the membrane including a material more flexible than the rigid material; attaching the stamp structure to a plurality of objects on a donor substrate to separate the plurality of objects from the donor substrate, the stamp structure directly contacting the plurality of objects and each of the plurality of objects being adsorbed to at least one of the plurality of holes; and moving the plurality of objects simultaneously to a target substrate and separating the stamp structure from the plurality of objects, wherein the plate part has a first and second surface, the first surface facing the plurality of objects and the second surface opposite the first surface, and wherein the membrane contacts one of the first and second surfaces, the plurality of holes passing through the plate part and the membrane when the membrane contacts the first surface. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16)
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Specification