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Calibration control device for metrology tools

  • US 9,631,913 B2
  • Filed: 08/29/2013
  • Issued: 04/25/2017
  • Est. Priority Date: 08/29/2013
  • Status: Active Grant
First Claim
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1. A calibration control device for being coupled to a measuring device, the calibration control device comprising:

  • a body portion configured to couple to a coupling feature on the measuring device;

    a circuit portion comprising;

    an identifier portion for electronically identifying at least one of the calibration control device and the coupled measuring device;

    a device-side data connection portion for coupling to the measuring device for receiving measuring data that is output from the measuring device after the measuring device has performed processing of a measurement signal independent of the calibration control device to provide the measuring data that is received by the device-side data connection portion;

    a host-side data connection portion for coupling to a host device and outputting measuring data;

    a calibration limit portion that defines a parameter limit that indicates when a certification of calibration of the measuring device expires, the parameter limit being defined in terms of a parameter that is related to at least one of time or usage of the measuring device, wherein an exceeding of the parameter limit by the parameter indicates that the certification of calibration of the measuring device has expired; and

    a comparison portion for comparing the current state of the parameter to the parameter limit and indicating when the parameter exceeds the parameter limit; and

    a controller portion for providing control signals to operate the calibration control device, wherein;

    the controller portion operates the calibration control device to output the measuring data that is received from the measuring device to the host device in a first mode through the host-side data connection portion when the parameter does not exceed the parameter limit; and

    the controller portion operates the calibration control device to perform a calibration limit function when the comparison portion of the calibration control device indicates that the parameter exceeds the parameter limit, the calibration limit function being indicative that the certification of calibration of the measuring device has expired.

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