Gyroscope structure and gyroscope with improved quadrature compensation
First Claim
1. A microelectromechanical gyroscope structure, comprising:
- a seismic mass;
a body element;
a spring structure suspending the seismic mass to the body element to allow a primary oscillation where at least part of the seismic mass is excited to oscillation in a first direction, and a secondary oscillation where at least part of the seismic mass moves in a second direction that is perpendicular to the first direction, and the seismic mass comprises a surface plane that extends planarly in the second direction and in a third direction, wherein the third direction is perpendicular to the first direction and the second direction;
a first conductor arranged to move with the seismic mass, the first conductor including a first surface that extends on the seismic mass in the first direction and the third direction;
a second conductor attached to the body element and including a second surface extending in the first direction and the third direction, and adjacent to the first surface;
a voltage element arranged to create between the first surface and the second surface a potential difference thereby inducing an electrostatic force in the second direction, which electrostatic force is modulated by the primary oscillation of the seismic mass.
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Accused Products
Abstract
A microelectromechanical gyroscope structure that comprises a seismic mass, a body element, and a spring structure suspending the seismic mass to the body element. In primary oscillation at least part of the seismic mass oscillates in out-of-plane direction. A first conductor is arranged to move with the seismic mass, and a second conductor is attached to the body element. The conductors include adjacent surfaces that extend in the first direction and the third direction. A voltage element is arranged to create between the first surface and the second surface a potential difference and thereby induce an electrostatic force in the second direction and modulated by the primary oscillation of the seismic mass.
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Citations
19 Claims
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1. A microelectromechanical gyroscope structure, comprising:
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a seismic mass; a body element; a spring structure suspending the seismic mass to the body element to allow a primary oscillation where at least part of the seismic mass is excited to oscillation in a first direction, and a secondary oscillation where at least part of the seismic mass moves in a second direction that is perpendicular to the first direction, and the seismic mass comprises a surface plane that extends planarly in the second direction and in a third direction, wherein the third direction is perpendicular to the first direction and the second direction; a first conductor arranged to move with the seismic mass, the first conductor including a first surface that extends on the seismic mass in the first direction and the third direction; a second conductor attached to the body element and including a second surface extending in the first direction and the third direction, and adjacent to the first surface; a voltage element arranged to create between the first surface and the second surface a potential difference thereby inducing an electrostatic force in the second direction, which electrostatic force is modulated by the primary oscillation of the seismic mass. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification