Wire grid polarizer with side region

• US 9,632,223 B2
• Filed: 08/27/2014
• Issued: 04/25/2017
• Est. Priority Date: 10/24/2013
• Status: Active Grant

• Current Assignee: Moxtek (Polatechno Co.,Ltd.)
• Original Assignee: Moxtek (Polatechno Co.,Ltd.)
• Inventors: Probst, Dean, Wu, Qihong, Gardner, Eric, Davis, Mark Alan
• Primary Examiner(s): Shafer, Ricky D
• Application Number:
  US14/470,351
• Publication Number:
  US 20150131150A1
• Time in Patent Office: 972 Days
• Field of Search: 35948505, 35948703
• CPC Class Codes: C23F 17/00 Multi-step processes for surface treatment of metallic material involving at least one process provided for in class C23 and at least one process covered by subclass C21D or C22F or class C25 coating for obtaining at least two superposed coatings either by methods not provided for in a single one of main groups C23C2/00 - C23C26/00, or by combinations of methods providedfor in subclasses C23C and C25D, C23C28/00
• CPC Class Codes: G02B 1/08 made of polarising materials
• CPC Class Codes: G02B 1/12 by surface treatment, e.g. by irradiation
• CPC Class Codes: G02B 5/3058 comprising electrically conductive elements, e.g. wire grids, conductive particles

Abstract

Structures and methods of making wire grid polarizers having multiple regions, including side bars, strips, and/or side ribs along sides of a central region. The central region can include a single region or multiple regions. Each region can have a different function for improving polarizer performance. The various regions can support each other for improved wire grid polarizer durability.

Claims

1. A wire grid polarizer comprising:

a) a substrate being substantially transmissive to incoming light;

b) an array of parallel, elongated first lower ribs disposed over the substrate, the first lower ribs having a bottom attached to the substrate, a top surface opposite the bottom, and two opposite sides;

c) an array of parallel, elongated, first upper ribs disposed over the top surface of the first lower ribs such that each first lower rib is paired with a corresponding first upper rib to define an array of center ribs;

d) an array of elongated side bars including a side bar disposed along each side of each of the center ribs;

e) a gap between each side bar and corresponding center rib and an adjacent side bar and corresponding center rib, each side bar is discontinuous with respect to adjacent side bars, and each side bar is not connected to adjacent side bars by material of the side bar; and

f) at least one of the first lower ribs, first upper ribs, and side bars is substantially reflective of incoming light.

2. The polarizer of claim 1, wherein at least one other of the first lower ribs, first upper ribs, and side bars is substantially absorptive of incoming light.

3. The polarizer of claim 1, wherein at least one other of the first lower ribs, first upper ribs, and side bars is substantially transmissive of incoming light.

4. The polarizer of claim 1, wherein the side bars extend along each side of the center ribs substantially from the bottom of the first lower ribs to a top of the first upper ribs.

5. The polarizer of claim 1, further comprising side ribs substantially filling the gaps.

6. The polarizer of claim 5, wherein the side ribs comprise a dielectric material and the dielectric material extends from the gaps above and over tops of the center ribs and the side bars.

7. The polarizer of claim 5, wherein at least one other of the first lower ribs, first upper ribs, side bars, and side ribs is substantially absorptive of incoming light.

8. The polarizer of claim 5, wherein:

a) the side ribs comprise second upper ribs disposed over second lower ribs;

b) one of the second lower ribs or second upper ribs is substantially transmissive of incoming light and the other of the second lower ribs or second upper ribs is substantially absorptive of incoming light; and

c) the side bars separate the first lower ribs from the second lower ribs and the first upper ribs from the second upper ribs.

9. The polarizer of claim 1, wherein the polarizer transmits 90% of one polarization of light and absorbs 80% an opposite polarization of light at light wavelengths from 400 nm through 700 nm.

10. The polarizer of claim 1, wherein an aspect ratio of the side bars is between 8 and 60.

11. The polarizer of claim 1, wherein the side bars have a width of between 5 nm and 20 nm and a thickness of between 150 nm and 300 nm.

12. The polarizer of claim 1, wherein:

a) at least one other of the first lower ribs, first upper ribs, and side bars is substantially absorptive of incoming light; and

b) at least one other of the first lower ribs, first upper ribs, and side bars substantially transmissive of incoming light.