Semiconductor device, display device, input/output device, and electronic device
First Claim
1. A semiconductor device comprising a transistor,wherein the transistor comprises an oxide semiconductor film, a gate insulating film, and a gate electrode,wherein the oxide semiconductor film comprises a first region, a second region and a third region,wherein the first region is between the second region and the third region,wherein each of the second region and the third region contains an impurity element,wherein the gate insulating film is between the oxide semiconductor film and the gate electrode,wherein the gate insulating film has a side region that is more on the inside than at least part of a side of the gate electrode, andwherein the gate electrode has regions overlapping with the second region and the third region in the oxide semiconductor film.
1 Assignment
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Accused Products
Abstract
A self-aligned transistor including an oxide semiconductor film, which has excellent and stable electrical characteristics, is provided. A semiconductor device is provided with a transistor that includes an oxide semiconductor film, a gate electrode overlapping with part of the oxide semiconductor film, and a gate insulating film between the oxide semiconductor film and the gate electrode. The oxide semiconductor film includes a first region and second regions between which the first region is positioned. The second regions include an impurity element. A side of the gate insulating film has a depressed region. Part of the gate electrode overlaps with parts of the second regions in the oxide semiconductor film.
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Citations
24 Claims
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1. A semiconductor device comprising a transistor,
wherein the transistor comprises an oxide semiconductor film, a gate insulating film, and a gate electrode, wherein the oxide semiconductor film comprises a first region, a second region and a third region, wherein the first region is between the second region and the third region, wherein each of the second region and the third region contains an impurity element, wherein the gate insulating film is between the oxide semiconductor film and the gate electrode, wherein the gate insulating film has a side region that is more on the inside than at least part of a side of the gate electrode, and wherein the gate electrode has regions overlapping with the second region and the third region in the oxide semiconductor film.
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13. A semiconductor device comprising a transistor,
wherein the transistor comprises an oxide semiconductor film, a first insulating film, a second insulating film, and a gate electrode, wherein the oxide semiconductor film comprises a first region, a second region, and a third region, wherein the first region is between the second region and the third region, wherein each of the second region and the third region contains an impurity element, wherein the first insulating film is in contact with the oxide semiconductor film, wherein the first insulating film contains oxygen, wherein the second insulating film is in contact with the first insulating film and the gate electrode, wherein the second insulating film contains nitrogen, wherein the second insulating film has a side region that is more on the inside than at least part of a side of the gate electrode, and wherein the gate electrode has regions overlapping with the second region and the third region in the oxide semiconductor film.
Specification