×

Patterned substrate design for layer growth

  • US 9,634,189 B2
  • Filed: 04/26/2016
  • Issued: 04/25/2017
  • Est. Priority Date: 09/06/2011
  • Status: Active Grant
First Claim
Patent Images

1. A device comprising:

  • a substrate comprising a patterned surface having a set of attributes conducive for growth of a buffer layer thereon, wherein the patterned surface includes a set of substantially flat top surfaces and a plurality of openings, wherein each substantially flat top surface includes a set of regions having a root mean square roughness less than approximately 0.5 nanometers, and wherein the plurality of openings have a characteristic size between approximately 0.1 micron and five microns;

    a group III-nitride buffer layer located directly on the substrate; and

    a group III-nitride light emitting active region located on the buffer layer.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×