Patterned substrate design for layer growth
First Claim
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1. A device comprising:
- a substrate comprising a patterned surface having a set of attributes conducive for growth of a buffer layer thereon, wherein the patterned surface includes a set of substantially flat top surfaces and a plurality of openings, wherein each substantially flat top surface includes a set of regions having a root mean square roughness less than approximately 0.5 nanometers, and wherein the plurality of openings have a characteristic size between approximately 0.1 micron and five microns;
a group III-nitride buffer layer located directly on the substrate; and
a group III-nitride light emitting active region located on the buffer layer.
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Abstract
A patterned surface for improving the growth of semiconductor layers, such as group III nitride-based semiconductor layers, is provided. The patterned surface can include a set of substantially flat top surfaces and a plurality of openings. Each substantially flat top surface can have a root mean square roughness less than approximately 0.5 nanometers, and the openings can have a characteristic size between approximately 0.1 micron and five microns. One or more of the substantially flat top surfaces can be patterned based on target radiation.
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Citations
20 Claims
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1. A device comprising:
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a substrate comprising a patterned surface having a set of attributes conducive for growth of a buffer layer thereon, wherein the patterned surface includes a set of substantially flat top surfaces and a plurality of openings, wherein each substantially flat top surface includes a set of regions having a root mean square roughness less than approximately 0.5 nanometers, and wherein the plurality of openings have a characteristic size between approximately 0.1 micron and five microns; a group III-nitride buffer layer located directly on the substrate; and a group III-nitride light emitting active region located on the buffer layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method comprising:
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creating a design for a patterned surface for a substrate of a device based on growth attributes for a buffer layer to be grown on the patterned surface, wherein the patterned surface includes a set of substantially flat top surfaces and a plurality of openings, wherein each substantially flat top surface includes a set of regions having a root mean square roughness less than approximately 0.5 nanometers, and wherein the plurality of openings have a characteristic size between approximately 0.1 micron and five microns; and fabricating the device using the design, wherein the fabricating includes; growing the buffer layer directly on the substrate; and growing a light emitting active region on the buffer layer. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A system comprising:
a computer system configured to implement a method of fabricating a device, the method comprising; fabricating a patterned surface for a substrate of the device based on growth attributes for a buffer layer to be grown on the patterned surface, wherein the patterned surface includes a set of substantially flat top surfaces and a plurality of openings, wherein each substantially flat top surface includes a set of regions having a root mean square roughness less than approximately 0.5 nanometers, and wherein the plurality of openings have a characteristic size between approximately 0.1 micron and five microns; growing a group III-nitride buffer layer directly on the patterned surface of the substrate; and growing a group III-nitride light emitting active region on the buffer layer. - View Dependent Claims (20)
Specification