Suppression of spurious modes of vibration for resonators and related apparatus and methods
First Claim
Patent Images
1. A device comprising:
- a micro-electromechanical (MEMS) resonating structure,a substrate, andanchors between the MEMS resonating structure and the substrate,wherein the MEMS resonating structure has at least one main eigenmode of vibration and at least one spurious eigenmode of vibration differing from the at least one main eigenmode of vibration, andwherein at least one anchor of the anchors comprises a plurality of repeating rectangular units defining for the anchor an eigenmode of vibration substantially matching the at least one spurious eigenmode of vibration of the MEMS resonating structure.
2 Assignments
0 Petitions
Accused Products
Abstract
Suppression of spurious modes of vibration for resonators and related apparatus and methods. A device may include a MEMS resonating structure, a substrate, and anchors between the MEMS resonating structure and the substrate. The MEMS resonating structure may have at least one main eigenmode of vibration and at least one spurious eigenmode of vibration. The anchors may be configured to suppress the response of the at least one spurious mode of vibration.
59 Citations
20 Claims
-
1. A device comprising:
-
a micro-electromechanical (MEMS) resonating structure, a substrate, and anchors between the MEMS resonating structure and the substrate, wherein the MEMS resonating structure has at least one main eigenmode of vibration and at least one spurious eigenmode of vibration differing from the at least one main eigenmode of vibration, and wherein at least one anchor of the anchors comprises a plurality of repeating rectangular units defining for the anchor an eigenmode of vibration substantially matching the at least one spurious eigenmode of vibration of the MEMS resonating structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
-
-
13. A device comprising:
-
a micro-electromechanical (MEMS) resonating structure, a substrate, and anchors between the MEMS resonating structure and the substrate, wherein the MEMS resonating structure has at least one main eigenmode of vibration and at least one spurious eigenmode of vibration differing from the at least one main eigenmode of vibration, and wherein at least one anchor of the anchors comprises a main beam and plurality of repeating open-ended units extending outwardly from the main beam and defining for the anchor an eigenmode of vibration substantially matching the spurious eigenmode of vibration of the MEMS resonating structure. - View Dependent Claims (14, 15, 16)
-
-
17. A device comprising:
-
a micro-electromechanical (MEMS) resonating structure, a substrate, and anchors between the MEMS resonating structure and the substrate, wherein the MEMS resonating structure has at least one main eigenmode of vibration and first and second spurious eigenmodes of vibration differing from the at least one main eigenmode of vibration, and wherein at least one anchor of the anchors comprises a plurality of units of substantially the same shape defining for the anchor first and second eigenmodes of vibration substantially matching the first and second spurious eigenmodes of vibration of the MEMS resonating structure. - View Dependent Claims (18, 19, 20)
-
Specification