Sensitivity adjustment apparatus and method for MEMS devices

• US 9,635,460 B2
• Filed: 08/16/2012
• Issued: 04/25/2017
• Est. Priority Date: 08/18/2011
• Status: Active Grant

• Current Assignee: Knowles Electronics Llc (Knowles Corporation)
• Original Assignee: Knowles Electronics Llc (Knowles Corporation)
• Inventors: Schultz, Jordan T., Dai, Weiwen, Loeppert, Peter V.
• Primary Examiner(s): Mei, Xu
• Assistant Examiner(s): Odunukwe, Ubachukwu
• Application Number:
  US13/586,999
• Publication Number:
  US 20130044898A1
• Time in Patent Office: 1,713 Days
• Field of Search: 381111, 381113, 381120, 381107, 381123, 381174, 381 8, 381 59, 381122, 381 98, 381 58, 384111, 384 8, 384107, 384113
• CPC Class Codes: H04R 19/005 using semiconductor materials
• CPC Class Codes: H04R 19/04 Microphones H04R19/01 takes precedence
• CPC Class Codes: H04R 3/06 of electrostatic transducers

Abstract

A microelectromechanical (MEMS) microphone includes a MEMS motor and a gain adjustment apparatus. The MEMS motor includes at least a diaphragm and a charge plate and is configured to receive sound energy and transform the sound energy into an electrical signal. The gain adjustment apparatus has an input and an output and is coupled to the MEMS motor. The gain adjustment apparatus is configured to receive the electrical signal from the MEMS motor at the input and adjust the gain of the electrical signal as measured from the output of the gain adjustment apparatus. The amount of gain is selected so as to obtain a favorable sensitivity for the microphone.

Claims

1. A microelectromechanical (MEMS) microphone comprising:

a MEMS motor, the MEMS motor including at least a diaphragm and a charge plate, the MEMS motor configured to receive sound energy and transform the sound energy into an electrical signal;

a gain adjustment apparatus, disposed on an integrated circuit and coupled to the MEMS motor, the gain adjustment apparatus comprising;

an input configured to receive the electrical signal from the MEMS motor;

an output;

an amplifier configured to provide an output voltage at the output based upon a gain provided by the amplifier and the electrical signal; and

a plurality of switchable capacitors, each of the plurality of switchable capacitors configured to be selectively connected to the input;

wherein selective connection of the plurality of switchable capacitors to the input causes a sensitivity of the MEMS microphone to be within a predetermined specific target sensitivity range for the MEMS microphone; and

wherein the plurality of switchable capacitors attenuate the output based at least in part upon a capacitance of the MEMS motor, a capacitance of the plurality of switchable capacitors that are connected to the input, and a capacitance of the integrated circuit.

2. The MEMS microphone of claim 1, wherein the gain adjustment apparatus is configured to be adjusted dynamically.

3. The MEMS microphone of claim 1, wherein the gain adjustment apparatus is configured to be adjusted permanently.

4. The MEMS microphone of claim 1, wherein at least two of the plurality of switchable capacitors are connected to the MEMS motor to attenuate the electrical signal from the MEMS motor to the amplifier.

5. The MEMS microphone of claim 1, wherein the gain adjustment apparatus further comprises a plurality of resistors, wherein at least one of the plurality of resistors is connected to the amplifier to change the gain of the amplifier.

6. The MEMS microphone of claim 5, wherein at least two of the plurality of resistors are connected to the amplifier to change the gain of the amplifier.

7. The MEMS microphone of claim 6, wherein the at least two of the plurality of resistors are in parallel to one another.

8. The MEMS microphone of claim 6, wherein the at least two of the plurality of resistors are in series to one another.

9. The MEMS microphone of claim 6, wherein the at least two of the plurality of resistors have different resistance values.

10. The MEMS microphone of claim 5, further comprising one or more switches, each of the one or more switches configured to connect one or more of the plurality of resistors to the amplifier.

11. The MEMS microphone of claim 1, further comprising one or more switches, each of the one or more switches configured to connect one or more of the plurality of switchable capacitors to the input.

12. The MEMS microphone of claim 1, wherein at least one of the plurality of switchable capacitors attenuates the electrical signal by 3 dB.

13. The MEMS microphone of claim 1, wherein the predetermined specific target sensitivity range for the MEMS microphone is a voltage range corresponding to an intensity of the sound energy.

14. A method of adjusting a microelectromechanical (MEMS) microphone, the method comprising:

setting a specific target sensitivity value for the MEMS microphone;

determining an initial sensitivity value of the MEMS microphone at a predetermined frequency during operation of the MEMS microphone, the MEMS microphone including a MEMS motor that transmits a signal to an amplifier;

determining that the initial sensitivity value is outside a predetermined range of the specific target sensitivity value; and

adjusting an amount of attenuation of the MEMS microphone by selectively actuating one or more switchable capacitors,

wherein the one or more switchable capacitors achieve the specific target sensitivity value based at least in part upon the initial sensitivity value of the MEMS microphone, a capacitance of the MEMS motor, capacitance of the actuated one or more capacitors and a capacitance of the integrated circuit.

15. The method of claim 14, further comprising permanently adjusting the attenuation of the MEMS microphone.

16. The method of claim 14, further comprising, wherein at least two switchable capacitors are selectively actuated.

17. The method of claim 14, further comprising:

determining a second sensitivity value of the MEMS microphone at the predetermined frequency during operation of the MEMS microphone based at least upon the selectively actuated one or more switchable capacitors;

determining that the second sensitivity value is outside the predetermined range of the specific target sensitivity value; and

adjusting, at the adjustment apparatus, a second amount of attenuation of the MEMS microphone by selectively actuating one or more switchable resistors.

18. The method of claim 17, further comprising:

determining a third sensitivity value of the MEMS microphone at the predetermined frequency during operation of the MEMS microphone based at least upon the selectively actuated one or more switchable capacitors and the selectively actuated one or more switchable resistors; and

determining that the third sensitivity value is within the predetermined range of the specific target sensitivity value.

19. The method of claim 17, wherein said adjusting the amount of attenuation of the MEMS microphone is performed before said adjusting the second amount of attenuation of the MEMS microphone.

20. The method of claim 17, wherein said adjusting the second amount of attenuation of the MEMS microphone comprises increasing a gain of the MEMS microphone.