Catadioptric imaging systems for digital scanner

• US 9,638,906 B2
• Filed: 11/21/2014
• Issued: 05/02/2017
• Est. Priority Date: 11/22/2013
• Status: Active Grant

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Williamson, David M.
• Primary Examiner(s): Wilkes, Zachary
• Assistant Examiner(s): DEHERRERA, KRISTINA M
• Application Number:
  US14/550,465
• Publication Number:
  US 20150146283A1
• Time in Patent Office: 893 Days
• Field of Search: 359355
• CPC Class Codes: G02B 17/08 Catadioptric systems used in non-imaging applications G02B19/00
• CPC Class Codes: G02B 17/0892 specially adapted for the UV
• CPC Class Codes: G03F 7/70225 Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices

Abstract

Projection optical system for forming an image on a substrate and including an illumination relay lens and a projection lens each of which is a catadioptric system. The projection lens may include two portions in optical communication with one another, the first of which is dioptric and the second of which is catadioptric. In a specific case, the projection optical system satisfies

$4<\frac{{\beta }_I}{{\beta }_T}<30,$
where β_I and β_T are magnifications of the first portion and the overall projection lens. Optionally, the projection lens may be structured to additionally satisfy

$6<\frac{{\beta }_{\mathrm{II}}}{{\beta }_T}<20,$
where β_II is a magnification of the second portion. A digital scanner including such projection optical system and operating with UV light having a spectral bandwidth on the order of 1 picometer. Method for forming an image with such projection optical system.

Claims

1. A projection optical system configured to form an image on a substrate and including a catadioptric illumination relay lens, a catadioptric projection lens, and a spatial light modulator (SLM) positioned to receive light from the catadioptric illumination relay lens and reflect said light towards the catadioptric projection lens,

wherein the catadioptric projection lens includes first and second portions in optical communication with one another,

said second portion configured as a catadioptric optical system forming, in light received from the catadioptric illumination relay lens, an intermediate optical image at a location between elements of the second portion;

said first portion located between the second portion and an image plane of the projection optical system, said first portion configured as a dioptric optical system disposed to transfer light from said location to the image plane of the projection optical system to form said image at the image plane of the projection optical system,

said catadioptric projection lens configured to satisfy a condition of |β

_II|<

|β

_I|, wherein β

_I denotes a magnification of the first portion and β

_II denotes a magnification of the second portion.

2. A digital scanner comprising the projection optical system according to claim 1.

3. A digital scanner according to claim 2, wherein the light includes UV light and has a spectral bandwidth on the order of 1 picometer.

4. A projection optical system according to claim 1, having a numerical aperture of 1.0 or higher.

5. A projection optical system according to claim 1, configured to form the image with at least 50×

reduction ratio.

6. A projection optical system according to claim 5, an operation of which in light having a central wavelength of about 193.3 nm and a spectral bandwidth of about 1 picometer is characterized by a first Strehl ratio at the central wavelength and a second Strehl ratio across the spectral bandwidth, both the first and second Strehl ratios exceeding 0.95.

7. A projection optical system according to claim 1, configured to form the image with at least 200×

reduction ratio.

8. A projection optical system according to claim 1, an operation of which in light having a central wavelength of about 193.3 nm and a spectral bandwidth of about 1 picometer is characterized by a first Strehl ratio at the central wavelength and a second Strehl ratio across the spectral bandwidth, both the first and second Strehl ratios exceeding 0.98.

9. A projection optical system according to claim 1, wherein the SLM is positioned to receive light that has been reflected by a first spherical mirror and to reflect light towards a second spherical mirror such as to form an intermediate image within the catadioptric projection lens.

10. A projection optical system according to claim 1, wherein

said catadioptric projection lens is configured to satisfy a condition of

11. A projection optical system according to claim 1, wherein

said catadioptric projection lens is configured to satisfy a condition of

12. A projection optical system according to claim 1, wherein

said second portion is configured such that said light passes through a first group of lenses including a first negative lens, then through a second group of lenses, and then is reflected with a concave mirror to form a reflected beam transmitted through the second group of lenses.

13. A projection optical system according to claim 12, wherein the second group of lenses includes second and third negative lenses immediately adjacent to one another, a concave surface of the second negative lens facing away from the concave mirror, a concave surface of the third negative lens facing the concave mirror.

14. A projection optical system according to claim 13, wherein the second group of lenses further comprises a positive lens between the first group of lenses and the third negative lens.

15. A projection optical system according to claim 12, wherein the first portion comprises at least two positive lenses disposed immediately adjacent to one another such as to receive light directly from said location.

16. A projection optical system according to claim 15, wherein the first portion further comprises at least two negative lenses disposed immediately adjacent to one another between said at least two positive lenses and the image plane.

17. A method for forming an image with a projection optical system comprising:

receiving radiation transmitted through a catadioptric illumination relay of the projection optical system with a spatial light modulator (SLM); and

reflecting radiation received by the SLM through a catadioptric projection lens of the projection optical system to form the image such that chromatic errors induced in the image are at least partially reduced,

wherein the reflecting includes forming an intermediate image within the catadioptric projection lens between first and second portions of the catadioptric projection lens, said second portion configured as a catadioptric optical system to transfer light from the SLM to a location of the intermediate image, said first portion configured as a dioptric optical system disposed to transfer light from said location to an image plane of the projection optical system, the catadioptric projection lens configured to satisfy a condition of

18. A method according to claim 17, further comprising digitally scanning a beam of radiation transmitted through the catadioptric illumination relay with the SLM.

19. A method according to claim 17, wherein the reflecting radiation received by the SLM includes transmitting said radiation by the SLM through the catadioptric projection lens configured to satisfy a condition of

20. A method according to claim 17, wherein said forming an intermediate image includes transmitting the radiation that has been received by the SLM from the catadioptric illumination relay through a first group of lenses including a first negative lens, then transmitting said radiation through a second group of lenses, then reflecting said radiation with a concave mirror to form a reflected beam to transmit said reflected beam through the second group of lenses.

21. A method according to claim 20, wherein the transmitting said radiation through a second group of lenses includes transmitting said radiation through second and third negative lenses immediately adjacent to one another, wherein a concave surface of the second negative lens is facing away from the concave mirror, while a concave surface of the third negative lens is facing the concave mirror.

22. A projection optical system configured to form an image on a substrate and including a catadioptric illumination relay lens, a catadioptric projection lens, and a spatial light modulator (SLM) positioned to receive light from the catadioptric illumination relay lens and reflect said light towards the catadioptric projection lens,

wherein the catadioptric projection lens includes first and second portions in optical communication with one another,

said second portion configured as a catadioptric optical system forming, in light received from the catadioptric illumination relay lens, an intermediate optical image at a location between elements of the second portion;

said second portion configured such that said light passes through a first group of lenses including a first negative lens, then through a second group of lenses, and then is reflected with a concave mirror to form a reflected beam transmitted through the second group of lenses;

said first portion configured as a dioptric optical system disposed to transfer light from said location to an image plane of the projection optical system to form an image of the intermediate optical image at the image plane,

wherein the second group of lenses includes second and third negative lenses immediately adjacent to one another, a concave surface of the second negative lens facing away from the concave mirror, a concave surface of the third negative lens facing the concave mirror.