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Ultra-responsive phase shifters for depletion mode silicon modulators

  • US 9,638,942 B2
  • Filed: 08/31/2015
  • Issued: 05/02/2017
  • Est. Priority Date: 05/14/2013
  • Status: Active Grant
First Claim
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1. An optical modulator semiconductor device comprising:

  • a substrate;

    an optical waveguide disposed upon the substrate;

    a p-type region of semiconductor material disposed within said optical waveguide, said p-type region having a p-type contact terminal;

    an n-type region of semiconductor material disposed within said optical waveguide, said n-type region having an n-type contact terminal;

    wherein said n-type region and said p-type region share a non-planar junction interface as viewed in a cross section taken perpendicular to a light propagation direction in said optical waveguide; and

    wherein said non-planar junction interface is configured to form at least two p/n junctions disposed one over the other in a direction normal to the substrate, so as to enhance an overlap between an optical mode in said optical waveguide and said non-planar junction interface when said optical modulator semiconductor device is operational.

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