Amorphous carbon resistive memory element with lateral heat dissipating structure
First Claim
1. A resistive memory element having a layer structure, the layer structure comprising:
- two layers forming two electrically conductive electrodes, respectively;
a resistively switchable material, sandwiched between the two layers forming the two electrodes, and in electrical connection therewith; and
a confining material, the resistively switchable material laterally confined within the confining material,wherein;
the confining materialis sufficiently electrically insulating for an electric signal applied between the two conductive electrodes to change a resistance state of the memory element, in operation; and
has a thermal conductivity greater than 0.5 W/(m·
K), andthe resistively switchable material is an amorphous compound comprising carbon, which has a maximal lateral dimension, along a direction parallel to an average plane of the two layers forming the two electrodes, that is less than 60 nm.
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Abstract
A resistive memory element is provided having a layer structure. The layer structure includes two layers forming two electrically conductive electrodes, respectively, a resistively switchable material sandwiched between the two layers forming the two electrodes, and in electrical connection therewith, and a confining material. The resistively switchable material is laterally confined within the confining material, between the two layers forming the electrodes. The confining material is sufficiently electrically insulating for an electric signal applied between the two conductive electrodes to change a resistance state of the memory element in operation. The confining material has a thermal conductivity greater than 0.5 W/(m·K), and preferably greater than or equal to 30 W/(m·K). The resistively switchable material is an amorphous compound comprising carbon, which has a maximal lateral dimension, along a direction parallel to an average plane of the two layers forming the electrodes, that is less than 60 nm.
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Citations
19 Claims
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1. A resistive memory element having a layer structure, the layer structure comprising:
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two layers forming two electrically conductive electrodes, respectively; a resistively switchable material, sandwiched between the two layers forming the two electrodes, and in electrical connection therewith; and a confining material, the resistively switchable material laterally confined within the confining material, wherein; the confining material is sufficiently electrically insulating for an electric signal applied between the two conductive electrodes to change a resistance state of the memory element, in operation; and has a thermal conductivity greater than 0.5 W/(m·
K), andthe resistively switchable material is an amorphous compound comprising carbon, which has a maximal lateral dimension, along a direction parallel to an average plane of the two layers forming the two electrodes, that is less than 60 nm. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 19)
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17. A resistive memory device comprising one or more memory elements, each of at least a subset of the one or more memory elements having a layer structure, the layer structure comprising:
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two layers forming two electrically conductive electrodes, respectively; a resistively switchable material, sandwiched between the two layers forming the two electrodes, and in electrical connection therewith; and a confining material, the resistively switchable material laterally confined within the confining material, wherein; the confining material is sufficiently electrically insulating for an electric signal applied between the two conductive electrodes to change a resistance state of the memory element, in operation; and has a thermal conductivity greater than 0.5 W/(m·
K), andthe resistively switchable material is an amorphous compound comprising carbon, which has a maximal lateral dimension, along a direction parallel to an average plane of the two layers forming the two electrodes, that is less than 60 nm. - View Dependent Claims (18)
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Specification