Integrated microfluidics system

• US 9,643,181 B1
• Filed: 02/08/2016
• Issued: 05/09/2017
• Est. Priority Date: 02/08/2016
• Status: Active Grant

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Chang, Hung-Yang, Li, Ning, Liu, Fei, Ouyang, Qiqing C., Subbanna, Seshadri, Wang, Yajuan
• Primary Examiner(s): Alexander, Lyle
• Assistant Examiner(s): KILPATRICK, BRYAN T
• Application Number:
  US15/017,998
• Time in Patent Office: 456 Days
• Field of Search: 4352887, 438 29, 422 8205, 422 681, 427100
• CPC Class Codes: B01L 2200/10 Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
• CPC Class Codes: B01L 2200/12 Specific details about manufacturing devices
• CPC Class Codes: B01L 2300/0636 Integrated biosensor, microarrays
• CPC Class Codes: B01L 2300/0645 Electrodes
• CPC Class Codes: B01L 2300/0654 Lenses; Optical fibres
• CPC Class Codes: B01L 2300/0887 Laminated structure
• CPC Class Codes: B01L 2300/12 Specific details about materials
• CPC Class Codes: B01L 3/502707 characterised by the manufacture of the container or its components by shaping or joining plastic parts B29C59/00, B29C65/00; by laminating B32B37/00; manufacture of microstructural devices in general B81C
• CPC Class Codes: B01L 3/502715 characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces
• CPC Class Codes: G01N 15/1023 Microstructural devices for non-optical measurement
• CPC Class Codes: G01N 15/1459 the analysis being performed on a sample stream
• CPC Class Codes: G01N 15/1484 microstructural devices
• CPC Class Codes: G01N 2015/1006 for cytology
• CPC Class Codes: G01N 2021/6482 Sample cells, cuvettes
• CPC Class Codes: G01N 21/645 Specially adapted constructive features of fluorimeters
• CPC Class Codes: G01N 21/6486 Measuring fluorescence of biological material, e.g. DNA, RNA, cells G01N21/6428 takes precedence

Abstract

A microfluidic system-on-a-chip includes signal processing, light generation and detection, and fluid handling functions formed on a single substrate. The disclosed integrated system has a smaller footprint than device structures where individual components are manufactured separately and then assembled. Moreover, the integrated system obviates alignment challenges associated with conventionally packaged architecture.

Claims

1. A microfluidic device comprising:

an integrated circuitry located in a first region of a semiconductor substrate;

a trench located in a second region of the semiconductor substrate and filled with an epitaxial layer;

a light source located in a first region of the epitaxial layer

a light detector located in a second region of the epitaxial layer; and

a microfluidic flow channel within a dielectric layer disposed over the semiconductor substrate and the epitaxial layer.

2. The microfluidic device of claim 1, wherein the integrated circuitry comprises transistors, memory cells and electrical contacts.

3. The microfluidic device of claim 1, wherein a top surface of each of the light source and the light detector is coplanar with a top surface of the semiconductor substrate.

4. The microfluidic device of claim 1, wherein the microfluidic flow channel is disposed over the light source and the light detector.

5. The microfluidic device of claim 1, further comprising an interconnect layer between the dielectric layer and the semiconductor substrate.

6. The microfluidic device of claim 1, wherein the epitaxial layer comprises gallium nitride.

7. The microfluidic device of claim 1, further comprising a light blocking layer within the epitaxial layer between the light source and the light detector.

8. The microfluidic device of claim 1, wherein the semiconductor substrate comprises silicon and the dielectric layer comprises silicon dioxide.

18. The microfluidic device of claim 1, further comprising a first spectral filter located over the light source, and a second spectral filter located over the light detector, wherein the first spectral filter and the second spectral filter are laterally surrounded by the dielectric layer.

9. A method of forming a microfluidic device, comprising:

forming an integrated circuitry in a first region of a semiconductor substrate;

forming a first trench in a second region of the semiconductor substrate;

filling the first trench with an epitaxial layer;

forming a light source within a second trench formed in a first region of the epitaxial layer;

forming a light detector within a third trench located in a second region of the epitaxial layer;

depositing a dielectric layer over the semiconductor substrate, the dielectric layer covering the light source and the light detector; and

forming a microfluidic flow channel within the dielectric layer.

10. The method of claim 9, further comprising forming an interconnect layer between the dielectric layer and the semiconductor substrate.

11. The method of claim 9, further comprising forming a light blocking layer within the epitaxial layer between the light source and the light detector.

12. The method of claim 9, wherein the light source is formed by epitaxially growing a lower gallium nitride layer of a first conductivity type and an upper gallium nitride layer of a second conductivity type that is opposite the first conductivity type within the second trench.

13. The method of claim 9, wherein the forming the microfluidic channel comprises etching a sacrificial layer formed on the dielectric layer.

14. The method of claim 12, further comprising forming a seed layer on a bottom surface of the second trench prior to the epitaxially growing the lower gallium nitride layer.

15. The method of claim 14, wherein the seed layer comprises aluminum nitride (AlN).

16. The method of claim 11, wherein the light blocking layer comprises copper, silver or aluminum.

17. The method of claim 11, wherein the forming the light blocking layer comprises:

forming a trench into the epitaxial layer, wherein the trench is located between the light source and the light detector; and

coating at least sidewalls of the trench with a light-blocking material.

19. A microfluidic device comprising:

an integrated circuitry located in a semiconductor substrate;

a light source located in a first region of an epitaxial layer that is disposed over the semiconductor substrate;

a light detector located in a second region of the epitaxial layer; and

a microfluidic flow channel located within a dielectric layer that is disposed over the semiconductor substrate.

20. The microfluidic device of claim 19, further comprising a first interconnect layer located between the epitaxial layer and the semiconductor substrate, and a second interconnect layer located between the epitaxial layer and the semiconductor substrate.