×

Force feedback loop for pressure sensors

  • US 9,645,029 B2
  • Filed: 04/07/2014
  • Issued: 05/09/2017
  • Est. Priority Date: 04/07/2014
  • Status: Active Grant
First Claim
Patent Images

1. A pressure sensor system, comprising:

  • a pressure sensor configured to measure a force caused by a pressure and to generate a sensor signal based on the measured pressure force and an electrostatic force; and

    a force feedback loop configured to receive the sensor signal and to generate an output signal and a feedback signal based on the sensor signal;

    wherein the feedback signal is utilized to generate the electrostatic force on the pressure sensor, wherein the electrostatic force is exerted on the pressure sensor in addition to the pressure force;

    wherein the pressure sensor is a capacitive sensor and is configured to generate an overall capacitance associated with the sensor signal, wherein the overall capacitance is caused by an overall force exerted to the pressure sensor by the electrostatic force and the measured pressure, wherein the overall capacitance is equal to or greater than a capacitance caused by a maximum measured pressure applied to the pressure sensor;

    wherein the feedback signal or the output signal is converted to a bias voltage to provide a target charge to be compared with a measurement charge.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×