Immersion exposure apparatus and device manufacturing method with measuring device to measure specific resistance of liquid

• US 9,645,505 B2
• Filed: 07/25/2013
• Issued: 05/09/2017
• Est. Priority Date: 06/09/2004
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Shiraishi, Kenichi
• Primary Examiner(s): LIU, CHIA HOW MICHAEL
• Application Number:
  US13/950,338
• Publication Number:
  US 20130335717A1
• Time in Patent Office: 1,384 Days
• Field of Search: 355 30
• CPC Class Codes: G03B 27/42 for automatic sequential copying of the same original G03B27/34, G03B27/53 take precedence
• CPC Class Codes: G03F 7/70341 Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply chemical composition of immersion liquids G03F7/2041
• CPC Class Codes: G03F 7/70875 Temperature, e.g. temperature control of masks or workpieces via control of stage temperature
• CPC Class Codes: G03F 7/70916 Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps

Abstract

An exposure apparatus is capable of accurately performing an exposure process and a measurement process based on a liquid immersion method. The exposure apparatus, which forms a liquid immersion area of a liquid on an image surface side of a projection optical system, and exposes a substrate via the projection optical system and the liquid of the immersion area, includes a measuring device which measures at least one of a property and composition of the liquid for forming the liquid immersion area.

Claims

1. An exposure apparatus in which a substrate is exposed to an exposure beam through an immersion liquid, the apparatus comprising:

a projection system having a plurality of optical elements including a final element;

a holding structure which holds the plurality of optical elements, the holding structure having a flange provided at an outer periphery thereof;

a supporting structure which supports the holding structure, the supporting structure having a supporting portion on which the flange of the holding structure is mounted;

a nozzle member having an aperture through which the exposure beam passes, the nozzle member having a supply opening facing downwardly and from which the immersion liquid is supplied, and a recovery opening facing downwardly and from which the supplied immersion liquid is collected, the supply opening being arranged between the aperture and the recovery opening;

an anti-vibration device disposed between the supporting structure and the nozzle member, and which prevents vibrations of the supporting structure caused by the nozzle member; and

a measuring device that measures at least one of a property and a composition of the immersion liquid in a flow path disposed downstream of the recovery opening, while the immersion liquid is in the exposure apparatus, the measuring device including at least one of;

a resistivity meter that measures a specific resistance value;

a TOC meter that measures total organic carbon,

a particle counter that measures an amount of a foreign matter,

a DO meter that measures a dissolved oxygen concentration,

a DN meter that measures a dissolved nitrogen concentration,

a silica meter that measures a silica concentration, and

an analyzer that analyzes a type and an amount of a live bacteria.

2. The exposure apparatus according to claim 1, wherein the foreign matter includes fine particles.

3. The exposure apparatus according to claim 1, wherein the measuring device measures the immersion liquid concurrently with an exposure operation.

4. The exposure apparatus according to claim 1, further comprising a storage device that stores a measurement result of the measuring device.

5. The exposure apparatus according to claim 4, wherein the storage device stores the measurement result in correspondence with a time course.

6. The exposure apparatus according to claim 4, wherein a plurality of shot areas of the substrate are sequentially exposed and the storage device stores the measurement result in correspondence with the shot areas.

7. The exposure apparatus according to claim 1, further comprising:

a recovery channel connected to the recovery opening; and

a branch channel connected to the recovery channel, wherein

the measuring device measures the immersion liquid that has come into the branch channel.

8. The exposure apparatus according to claim 1, further comprising a controller that determines whether a measurement result of the measuring device is abnormal, and that controls an exposure operation based on the determination.

9. A device manufacturing method using an exposure apparatus according to claim 1.

10. The exposure apparatus according to claim 1, further comprising a further supporting structure which supports the nozzle member, wherein the anti-vibration device is arranged between the supporting structure and the further supporting structure.

11. The exposure apparatus according to claim 1, wherein the nozzle member is disposed below the supporting structure.

12. The exposure apparatus according to claim 1, wherein the nozzle member is disposed below the anti-vibration device.

13. The exposure apparatus according to claim 1, wherein the nozzle member is disposed below the flange of the holding structure.

14. An exposure method comprising:

exposing a substrate to an exposure beam through a projection system and an immersion liquid in an exposure apparatus, the projection system having a plurality of optical elements including a final element, the plurality of optical elements being held by a holding structure, the holding structure having a flange provided at an outer periphery thereof;

supporting the holding structure by a supporting structure, the supporting structure having a supporting portion on which the flange of the holding structure is mounted;

supplying and recovering the immersion liquid with a nozzle member having an aperture through which the exposure beam passes, the nozzle member having a supply opening facing downwardly and from which the immersion liquid is supplied, and a recovery opening facing downwardly and from which the supplied immersion liquid is collected, the supply opening being arranged between the aperture and the recovery opening;

preventing, with an anti-vibration device disposed between the supporting structure and the nozzle member, vibrations of the supporting structure caused by the nozzle member; and

measuring at least one of a property and a composition of the immersion liquid in a flow path disposed downstream of the recovery opening, while the immersion liquid is in the exposure apparatus, wherein the at least one of the property and the composition of the immersion liquid includes at least one of;

a specific resistance value;

total organic carbon,

an amount of foreign matter,

an oxygen concentration dissolved in the immersion liquid,

a nitrogen concentration dissolved in the immersion liquid,

a silica concentration, and

an amount of live bacteria in the immersion liquid.

15. The exposure method according to claim 14, wherein the foreign matter includes fine particles.

16. The exposure measuring according claim 14, wherein the measuring is performed concurrently with an exposure operation.

17. The exposure method according to claim 14, further comprising storing a result of the measuring in correspondence with a time course.

18. The exposure method according to claim 14, further comprising storing a result of the measuring in correspondence with a plurality of shot areas of the substrate, wherein the shot areas are sequentially exposed during an exposure operation.

19. The exposure method according to claim 14, wherein the immersion liquid is collected from the recovery opening through a recovery channel, which is connected to a branch channel, and the measuring includes a measurement of the immersion liquid that has come to the branch channel.

20. The exposure method according to claim 14, further comprising:

determining whether a result of the measurement is abnormal; and

controlling an exposure operation based on the determination.

21. The exposure method according to claim 14, wherein a further supporting structure supports the nozzle member, and the anti-vibration device is arranged between the supporting structure and the further supporting structure.

22. The exposure method according to claim 14, wherein the nozzle member is disposed below the supporting structure.

23. The exposure method according to claim 14, wherein the nozzle member is disposed below the anti-vibration device.

24. The exposure method according to claim 14, wherein the nozzle member is disposed below the flange of the holding structure.