×

Immersion exposure apparatus and device manufacturing method with measuring device to measure specific resistance of liquid

  • US 9,645,505 B2
  • Filed: 07/25/2013
  • Issued: 05/09/2017
  • Est. Priority Date: 06/09/2004
  • Status: Expired due to Fees
First Claim
Patent Images

1. An exposure apparatus in which a substrate is exposed to an exposure beam through an immersion liquid, the apparatus comprising:

  • a projection system having a plurality of optical elements including a final element;

    a holding structure which holds the plurality of optical elements, the holding structure having a flange provided at an outer periphery thereof;

    a supporting structure which supports the holding structure, the supporting structure having a supporting portion on which the flange of the holding structure is mounted;

    a nozzle member having an aperture through which the exposure beam passes, the nozzle member having a supply opening facing downwardly and from which the immersion liquid is supplied, and a recovery opening facing downwardly and from which the supplied immersion liquid is collected, the supply opening being arranged between the aperture and the recovery opening;

    an anti-vibration device disposed between the supporting structure and the nozzle member, and which prevents vibrations of the supporting structure caused by the nozzle member; and

    a measuring device that measures at least one of a property and a composition of the immersion liquid in a flow path disposed downstream of the recovery opening, while the immersion liquid is in the exposure apparatus, the measuring device including at least one of;

    a resistivity meter that measures a specific resistance value;

    a TOC meter that measures total organic carbon,a particle counter that measures an amount of a foreign matter,a DO meter that measures a dissolved oxygen concentration,a DN meter that measures a dissolved nitrogen concentration,a silica meter that measures a silica concentration, andan analyzer that analyzes a type and an amount of a live bacteria.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×