Method for smoothing surface of a substrate containing gallium and nitrogen

• US 9,646,827 B1
• Filed: 08/23/2012
• Issued: 05/09/2017
• Est. Priority Date: 08/23/2011
• Status: Active Grant

• Current Assignee: Korrus Incorporated (MKD Electric, Inc.)
• Original Assignee: Soraa, Inc.
• Inventors: Chakraborty, Arpan, Tyagi, Anurag
• Primary Examiner(s): Ingham, John C
• Assistant Examiner(s): Muse, Ismail
• Application Number:
  US13/593,128
• Time in Patent Office: 1,720 Days
• Field of Search: 257 13, 257 76, 257 99, 257201, 438689
• CPC Class Codes: H01L 21/02389 Nitrides
• CPC Class Codes: H01L 21/0254 Nitrides
• CPC Class Codes: H01L 21/02658 Pretreatments cleaning in general H01L21/02041
• CPC Class Codes: H01L 33/0075 comprising nitride compounds

Abstract

Disclosed is a method for processing GaN based substrate material for manufacturing light-emitting diodes, lasers, and other types of devices. In various embodiments, a GaN substrate is exposed to nitrogen and hydrogen at a high temperature. This process causes the surface of the GaN substrate to anneal and become smooth. Then other processes, such as growing epitaxial layers over the surface of GaN substrate, can be performed over the smooth surface of the GaN substrate.

Claims

1. A method for smoothing a substrate for epitaxial growth, said substrate comprising at least a gallium and nitrogen containing material, and having a top surface, at least a portion of said top surface having a first RMS roughness, the method comprising:

heat treating said substrate to form an annealed substrate surface; and

wherein said heat treating comprises at least a first step and a second step, in said first step, subjecting said substrate to a first temperature of at least about 1000°

C. for a first time period of about 5 minutes to about 30 minutes in the presence of H₂ and NH₃, and, in said second step, after said first step, subjecting the substrate to a second temperature, substantially higher than said first temperature for a second time period in the presence of at least NH₃ to form said annealed substrate surface wherein, after said first step, said at least a portion of said top surface comprises a first surface smoothness, and after said second step, said at least a portion of said top surface comprises a second surface smoothness different than said first surface smoothness and defined by a second RMS roughness less than said first RMS roughness, and

wherein said heat treating occurs prior to epitaxial growth.

2. The method of claim 1, wherein said first step comprises providing NH₃ at a flow rate of 8 slpm.

3. The method of claim 1, further comprising forming one or more epitaxial layers over the top surface of said top surface.

4. The method of claim 3, wherein forming one or more epitaxial layers over the top surface of said top surface using a chemical vapor deposition.

5. The method of claim 1, further comprising forming LED chips using said top surface.

6. The method of claim 1, wherein the first time period is 12 minutes to 18 minutes.

7. The method of claim 1, wherein the second time period is 10 minutes.

8. The method of claim 1, wherein said second step comprises exposing the substrate to one or more Group-III materials during the second time period.

9. The method of claim 1, further comprising polishing the top surface of the substrate before placing the substrate in the processing apparatus.

10. The method of claim 1, further comprising forming a rectifying device structure over the annealed substrate surface.

11. The method of claim 1, further comprising forming a transistor device structure over the annealed substrate surface.

12. The method of claim 1, wherein said second RMS roughness is less than 0.1 nm over an area of 25 μ

m².

13. The method of claim 3, wherein the one or more epitaxial layers are formed at a temperature of at least 800°

C.

14. The method of claim 13, wherein the one or more epitaxial layers are formed at a temperature of less than 1,000°

C.

15. The method of claim 1, wherein the substrate has a surface orientation characterized by a polar, non-polar, or semi-polar crystal orientation.

16. The method of claim 3, further comprising forming contact regions over the one or more epitaxial layers.

17. The method of claim 3, further comprising performing an etching process over the annealed substrate surface.

18. The method of claim 1, further comprising polishing the top surface of the substrate before the substrate is subjected to said first step.

19. The method of claim 1, further comprises forming a rectifying device structure over said top surface.

20. The method of claim 3, further comprising separating said top surface from the one or more epitaxial layers.

21. The method of claim 1, wherein,

in said first step, said H₂ is provided at a flow rate of 31 slpm, and said NH₃ is provided at a flow rate of 8 slpm;

and

in said second step, said NH₃ is provided at a flow rate of 8 slpm.

22. The method of claim 12, wherein said second RMS roughness is less than 0.05 nm over an area of 25 μ

m².

23. The method of claim 1, wherein said substrate comprises a plurality of defects having a first depth of at least 8 nm before said heat treating, said plurality of defects having a second depth of less than 2 nm after said heat treating.

24. The method of claim 1, wherein said first temperature is about 1050°

C. to about 1100°

C.

25. The method of claim 1, wherein said second temperature is at least about 1300°

C.

26. The method of claim 1, wherein during said heat treating said substrate, nothing is grown on the substrate.