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Energy harvesting device, method for manufacturing the same, and wireless device including the same

  • US 9,647,579 B2
  • Filed: 04/10/2015
  • Issued: 05/09/2017
  • Est. Priority Date: 09/11/2014
  • Status: Expired due to Fees
First Claim
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1. A energy harvesting device, comprising:

  • a support body;

    a first cantilever connected to the support body; and

    an electricity generation layer on the first cantilever,wherein the first cantilever has a thickness that gradually increases in a direction that is away from the support body.

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