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Target supply device

  • US 9,648,715 B2
  • Filed: 04/29/2016
  • Issued: 05/09/2017
  • Est. Priority Date: 12/13/2013
  • Status: Active Grant
First Claim
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1. A target supply device comprising:

  • a target generator configured to accommodate a liquid target material and having a nozzle with a nozzle hole from which the liquid target material is outputted; and

    a filter disposed in the target generator and made of glass, the glass reacting with the liquid target material, so that a solid reaction product is generated, wherein;

    the filter includes a first through-hole configured to allow the liquid target material to pass therethrough; and

    an inner surface of the first through-hole is coated with a material which is not easy to react with the liquid target material.

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