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Membrane-based fluid control in microfluidic devices

  • US 9,651,166 B2
  • Filed: 02/26/2015
  • Issued: 05/16/2017
  • Est. Priority Date: 01/31/2007
  • Status: Active Grant
First Claim
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1. A microfluidic valve system, comprising:

  • a substrate having first and second channels embedded therein and having a first layer of material and a second layer of material;

    a valve seat in fluid communication with the first and second channels;

    a compliant membrane; and

    a mechanically actuable displacement element for applying a mechanical force to the compliant membrane to bring the compliant membrane into sealable contact with the valve seat, thereby closing the valve system, wherein portions of the second layer of material form sidewalls of the second channel and the valve seat.

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