Yaw-rate sensor with a compensating mass
First Claim
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1. A yaw-rate sensor, comprising:
- a substrate having a main extension plane to detect a yaw rate about a first direction extending either parallel to the main extension plane or perpendicular to the main extension plane;
a drive device;
a first Coriolis mass, the drive device being configured to drive at least a part of the first Coriolis mass in a direction parallel to a drive direction extending perpendicular to the first direction, wherein in the case of the yaw rate about the first direction, at least the part of the first Coriolis mass undergoes a Coriolis acceleration parallel to a detection direction extending both perpendicular to the drive direction and perpendicular to the first direction; and
a first compensating mass having a coupling with the first Coriolis mass via a first connection to the substrate, such that a deflection of the first Coriolis mass in a direction parallel to the detection direction caused by the Coriolis acceleration leads to a deflection of the first compensating mass in an opposite direction.
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Abstract
A yaw-rate sensor, having a substrate which has a main extension plane, for detecting a yaw rate about a first direction extending either parallel to the main extension plane or perpendicular to the main extension plane. The yaw-rate sensor has a drive device, a first Coriolis mass and a second Coriolis mass, the drive device being configured to drive at least one part of the first Coriolis mass and at least one part of the second Coriolis mass in a direction parallel to a drive direction extending perpendicular to the first direction.
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Citations
14 Claims
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1. A yaw-rate sensor, comprising:
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a substrate having a main extension plane to detect a yaw rate about a first direction extending either parallel to the main extension plane or perpendicular to the main extension plane; a drive device; a first Coriolis mass, the drive device being configured to drive at least a part of the first Coriolis mass in a direction parallel to a drive direction extending perpendicular to the first direction, wherein in the case of the yaw rate about the first direction, at least the part of the first Coriolis mass undergoes a Coriolis acceleration parallel to a detection direction extending both perpendicular to the drive direction and perpendicular to the first direction; and a first compensating mass having a coupling with the first Coriolis mass via a first connection to the substrate, such that a deflection of the first Coriolis mass in a direction parallel to the detection direction caused by the Coriolis acceleration leads to a deflection of the first compensating mass in an opposite direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification