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Microelectromechanical gyroscopes and related apparatus and methods

  • US 9,651,376 B2
  • Filed: 01/28/2014
  • Issued: 05/16/2017
  • Est. Priority Date: 03/01/2010
  • Status: Active Grant
First Claim
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1. An apparatus, comprising:

  • a substrate;

    a plate, comprising a piezoelectric material, suspended from the substrate and excitable by a gyroscopic effect, the plate having a thickness and including a temperature compensation structure including at least one layer that has a stiffness that increases with increasing temperature over a temperature range and at least one layer that has a stiffness that decreases with increasing temperature over the temperature range;

    a first electrode coupled to the plate and configured to excite a first mode of vibration in the plate; and

    a second electrode coupled to the plate and configured to sense a second mode of vibration in the plate.

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