Multiplex tunable filter spectrometer

• US 9,651,422 B2
• Filed: 10/20/2014
• Issued: 05/16/2017
• Est. Priority Date: 04/08/2009
• Status: Active Grant

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Saptari, Vidi A.
• Primary Examiner(s): Chowdhury, Tarifur
• Assistant Examiner(s): Cook, Jonathon
• Application Number:
  US14/518,974
• Publication Number:
  US 20150103354A1
• Time in Patent Office: 939 Days
• Field of Search: 356455
• CPC Class Codes: G01J 2003/1247 Tuning
• CPC Class Codes: G01J 3/06 Scanning arrangements arrangements for order-selection
• CPC Class Codes: G01J 3/32 Investigating bands of a spectrum in sequence by a single detector
• CPC Class Codes: G01N 2021/3174 Filter wheel
• CPC Class Codes: G01N 21/255 Details, e.g. use of specially adapted sources, lighting or optical systems
• CPC Class Codes: G01N 21/314 with comparison of measurements at specific and non-specific wavelengths dual wavelength spectrometry G01J3/427
• CPC Class Codes: G01N 21/33 using ultraviolet light G01N21/39 takes precedence
• CPC Class Codes: G01N 21/3504 for analysing gases, e.g. multi-gas analysis
• CPC Class Codes: G01N 2201/129 Using chemometrical methods

Abstract

The invention provides spectroscopic systems and spectrometers employing an optical interference filter module having a plurality of bandpass regions. In certain embodiments, the systems include a mechanism for wavelength tuning/scanning and wavelength band decoding based on an angular motion of one or more filters. A spectral processing algorithm separates the multiplexed wavelength-scanned bandpass regions and quantifies the concentrations of the analyzed chemical and/or biological species. The spectroscopic system allows for compact, multi-compound analysis, employing a single-element detector for maximum performance-to-cost ratio. The spectroscopic system also allows for high-sensitivity measurement and robust interference compensation.

Claims

1. A spectroscopic method for detecting and/or quantifying one or more species in a sample, the method comprising the steps of:

directing electromagnetic radiation from an electromagnetic radiation source into an optical filter module comprising one or more optical interference filters, the one or more optical filters comprising a plurality of multiplexed bandpass regions configured to transmit multiple wavelength bands of electromagnetic radiation through the filter module simultaneously;

directing the simultaneously transmitted multiple wavelength bands of electromagnetic radiation through a sample comprising one or more species;

directing the simultaneously transmitted multiple wavelength bands of electromagnetic radiation from the sample into an optical detector;

generating, by the optical detector, one or more electrical signals indicative of electromagnetic radiation intensity over a sweep of wavelengths within each of the multiple wavelength bands;

continuously sweeping the plurality of multiplexed bandpass regions to produce data corresponding to the one or more electrical signals; and

processing the data corresponding to the one or more electrical signals to identify and/or quantify one or more species present in the sample.

2. The spectroscopic method of claim 1, wherein the optical filter module comprises an interference filter comprising multiple bandpass regions.

3. The spectroscopic method of claim 1, wherein the optical filter module comprises a plurality of interference filters which collectively comprise the multiple bandpass regions.

4. The spectroscopic method of claim 1, wherein the optical filter module adjusts an incident angle of the electromagnetic radiation from the electromagnetic radiation source onto the one or more optical filters.

5. The spectroscopic method of claim 4, wherein the optical filter module comprises a rotatable filter assembly that adjusts the incident angle.

6. The spectroscopic method of claim 5, wherein the rotatable filter assembly comprises a position detector that produces at least a first signal comprising a series of digital pulses corresponding to the angular position of the rotatable filter assembly.

7. The spectroscopic method of claim 6, wherein the position detector clocks analog-to-digital conversion.

8. The spectroscopic method of claim 5, wherein the rotatable filter assembly comprises at least four multiplexed bandpass regions on a single rotatable filter assembly with a single rotation axis.

9. The spectroscopic method of claim 1, comprising:

identifying, by a processor, one or more species present in a sample from which the electromagnetic radiation emanates or through which the electromagnetic radiation passes prior to reception by the optical detector.

10. The spectroscopic method of claim 9, comprising:

processing, by the processor, data corresponding to the electromagnetic radiation intensity measured by the detector over the multiple wavelength bands, thereby identifying one or more species present in the sample.

11. The spectroscopic method of claim 9, comprising:

processing, by the processor, data corresponding to the electromagnetic radiation intensity measured by the detector over the multiple wavelength bands, thereby quantifying each of one or more species present in the sample.

12. The spectroscopic method of claim 1, further comprising:

containing a sample in a container through which the electromagnetic radiation passes or from which the electromagnetic radiation emanates prior to reception by the optical detector.

13. The spectroscopic method of claim 12, wherein the container is upstream of the optical filter module.

14. The spectroscopic method of claim 12, wherein the container is downstream of the optical filter module.

15. The spectroscopic method of claim 1, wherein the optical detector, in conjunction with the optical filter module, generates one or more electrical signals indicative of electromagnetic radiation intensity over a sweep of wavelengths within each of the multiple wavelength bands.

16. The spectroscopic method of claim 1, comprising:

providing the electromagnetic radiation source.

17. The spectroscopic method of claim 16, wherein the electromagnetic radiation source is a producer of at least one member selected from the group consisting of visible light, infrared light, and ultraviolet light.