Reducing background fluorescence in MEMS materials by low energy ion beam treatment

• US 9,651,539 B2
• Filed: 03/16/2015
• Issued: 05/16/2017
• Est. Priority Date: 10/28/2012
• Status: Active Grant

• Current Assignee: Quantapore, Inc.
• Original Assignee: Quantapore, Inc.
• Inventors: Huber, Martin, Hall, Adam R., Clancy, Bason E.
• Primary Examiner(s): Smith, David E
• Application Number:
  US14/659,432
• Publication Number:
  US 20160077078A1
• Time in Patent Office: 792 Days
• CPC Class Codes: B81B 2201/0214 Biosensors; Chemical sensors
• CPC Class Codes: B81B 2201/047 Optical MEMS not provided for in B81B2201/042 - B81B2201/045
• CPC Class Codes: B81B 2203/0353 Holes
• CPC Class Codes: B81B 7/02 containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS] B81B7/04 takes precedence
• CPC Class Codes: B81C 1/00206 Processes for functionalising a surface, e.g. provide the surface with specific mechanical, chemical or biological properties
• CPC Class Codes: C12Q 1/6818 involving interaction of two or more labels, e.g. resonant energy transfer
• CPC Class Codes: C12Q 1/6869 Methods for sequencing
• CPC Class Codes: C12Q 2525/101 incorporating non-naturally occurring nucleotides, e.g. inosine
• CPC Class Codes: C12Q 2565/101 Interaction between at least two labels
• CPC Class Codes: C12Q 2565/631 being a biochannel or pore
• CPC Class Codes: G01N 33/48721 Investigating individual macromolecules, e.g. by translocation through nanopores Coulter counters in general G01N15/12; fabrication methods for nanoscale apertures B81B1/00; sequencing of nucleic acids C12Q1/68

Abstract

Methods for fabricating materials useful for optical detection in microfluidic and nanofluidic devices, such as those used in nanopore-based nucleic acid sequencing are described herein. In certain variations, a method of reducing background fluorescence in a MEMS material may include the step of treating a surface of the MEMS material with a low energy ion beam.

Claims

1. A method of reducing background fluorescence in a nanopore array comprising a membrane of optically active MEMS material, the method comprising the step of treating a surface of the optically active MEMS material with a low energy helium ion beam without melting, vaporization, deformation or sputtering in the membrane and with fluorescence background reduction that permits single fluorophores transiting nanopores of the nanopore array to be detected.

2. The method of claim 1, wherein said MEMS material is silicon nitride.

3. The method of claim 2, wherein said low energy helium ion beam delivers to said surface of said silicon nitride a dosage in the range of from 2e-10 to 8e-10 nC/nm^2.

4. The method of claim 1, wherein said step of treating includes directing to said surface a helium ion beam that delivers thereto a dose in the range of from 2e-10 to 8e-10 nC/nm^2.

5. The method of claim 1 wherein said detection is carried out with a microscope configured for single molecule detection.

6. The method of claim 1 wherein said MEMS material is selected from the group consisting of silicon nitride, silicon dioxide and aluminum oxide.